LSI inspection method and apparatus, and LSI tester

Abstract

A test of an LSI device under test (20) including a physical layer section (21) which has a high-speed interface function is performed. An LSI device test unit (1) including a reference LSI device (10) which has already been confirmed as being non-defective is placed on a test board (2), and high-speed pins of the LSI devices (10, 20) are connected to each other. An LSI tester (3) accesses logical layer sections (12, 22) at a low speed to control a high-speed communication between physical layer sections (11, 21) and read received data, and determines whether or not the LSI device under test (20) is defective.

Description

technical field [0001] The present invention relates to an inspection of an LSI mounted with a high-speed interface. Background technique [0002] So far, when inspecting LSIs equipped with high-speed interfaces such as IEEE 1394 and USB, the inspection is carried out in such a way that the high-speed signals input to the LSI are directly supplied from the LSI detector, and the high-speed signals output from the LSI are directly read into the In an LSI detector (for example, refer to Patent No. 3058130). [0003] FIG. 9 is a diagram showing the configuration of a conventional LSI inspection system. In FIG. 9 , the physical layer unit 21 having the high-speed interface function in the LSI 20 to be inspected placed on the inspection board 52 is inspected. [0004] When checking the signal reception of the physical layer unit 21 , a high-speed signal is directly sent from the LSI detector 53 to the physical layer unit 21 . The physical layer unit 21 converts the received hig...

AI Technical Summary

Problems solved by technology

However, in this case, first of all, it is difficult to inspect the high-speed operating circuit itself installed in the inspection target LSI

Therefore, when the circuit inspection is not sufficient, it is possible to misjudge a good product as a defective product

The cost will also increase due to the increase in the area of ​​the LSI

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