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Wafer carrier door and latching mechanism with hourglass shaped key slot

A latching device, hourglass-type technology, used in shipping and packaging, packaging item types, special packaging items, etc., to solve problems such as difficult key insertion, product breakage, key and slot damage, etc.

Inactive Publication Date: 2008-10-29
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, narrowing the tolerance makes key insertion difficult and can cause key jamming, which can lead to key and slot damage
This damage produces unwanted particulates which can lead to ineffective processing and product breakage

Method used

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  • Wafer carrier door and latching mechanism with hourglass shaped key slot
  • Wafer carrier door and latching mechanism with hourglass shaped key slot
  • Wafer carrier door and latching mechanism with hourglass shaped key slot

Examples

Experimental program
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Embodiment Construction

[0024] first reference figure 1 , wherein an overview of a wafer container 100 is shown. The wafer container 100 has a cover 102 composed of polycarbonate plastic including a top 104 , a bottom 106 , a pair of opposing sides 108 and 110 , and a back 112 . Door 114 fits over door recess 118 to enclose front opening 116 of cover 102 to form an enclosure. Wafer support frame 120 (supports semiconductor wafers in the enclosure. A kinematic coupling 124 mounted on the outer surface of the enclosure facilitates automated handling of the container in use and provides a reference for positioning the wafer on the rack during processing. A robotic lift flange 126 is mounted on the outer surface of the hood top 104 to facilitate automated handling and transport of the container 100 when in use.

[0025] refer to figure 2 , which shows the door 114 on the wafer container of the present invention. The door 114 mainly includes a door frame 150 and locking devices 160 and 200 . Device ...

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PUM

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Abstract

A door for a wafer carrier having a latching mechanism with rotatable actuating member. The rotatable actuating member is actuated from outside the wafer carrier using a key inserted into a key slot in the rotatable actuating member. The key slot is formed in an hourglass shape and comprised of an abrasion resistant material to reduce generation of particulate contaminants.

Description

[0001] This application claims the benefit of US Provisional Application No. 60 / 349,166, filed January 15, 2002, under 35 U.S.C 119(e). technical field [0002] The present invention generally relates to a wafer carrier for supporting, restraining, storing and precisely securing semiconductor wafer trays used in the production of integrated circuits. More particularly, the present invention relates to a slot for facilitating latching means to securely secure the door to the cover of a wafer container. Background technique [0003] Processing semiconductor wafers into complete electronic components typically requires many processing steps in which the wafer must be processed and handled. Wafers are expensive, fragile, and easily damaged by physical and electronic vibrations. In addition, successful processing requires extreme cleanliness, free from particulates and other contamination. As a result, special containers or carriers have been developed for wafer processing, han...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D85/48H01L21/68
Inventor S·埃贡
Owner ENTEGRIS INC