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Deformable mirror device, deformable mirror plate

A technology of deformable mirrors and devices, applied in the direction of instruments, mirrors, optical components, etc., to achieve the effect of preventing cracks

Inactive Publication Date: 2008-11-12
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the mirror only deforms in two modes, snapping and unsnapping the flex member

Method used

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  • Deformable mirror device, deformable mirror plate
  • Deformable mirror device, deformable mirror plate
  • Deformable mirror device, deformable mirror plate

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0069] First, a first embodiment of the deformable mirror device 1 according to the present invention will be described below by referring to FIG. 2 . The deformable mirror device 1 deforms a mirror surface by using a flexible member that assumes a different part state in a deformation mode when a part with a different cross-sectional profile is formed and an intensity distribution pattern is given.

[0070] As shown in FIG. 2 , a deformable mirror device 1 according to the present invention includes at least a flexible member 2 , a reflective film 3 , a substrate 4 , an upper electrode 8 and a lower electrode 9 . The substrate 4 of the mirror device 1 is provided with two circular grooves for creating a first space 5 and a second space 7, the two grooves being arranged side by side. The first space 5 and the second space 7 defined by the two grooves are connected to each other by a flow channel 6 .

[0071] The flexible member 2 is bonded to the substrate 4 so as to cover th...

no. 2 approach

[0103] Now, a second embodiment of the present invention will be described below by referring to FIG. 6 . The deformable mirror device 20 of the second embodiment is different from the first embodiment in that the first embodiment is adapted to generate a driving force for deforming the mirror surface by the attractive force between the upper electrode 8 and the lower electrode 9, while the second embodiment The embodiment is suitable for generating a driving force for deforming a mirror surface by deformation of the piezoelectric element 21 .

[0104] In FIG. 6 , the same components as those of the first embodiment are denoted by the same reference symbols, respectively, and will not be further described.

[0105] In the deformable mirror device 20, the flexible member 2 is bonded to the substrate 4 so as to cover only the first space 5, as shown in FIG. 6 . On the second space 7 side, an elastic conductive plate 22 is bonded to the substrate 4 so as to cover only the second...

no. 3 approach

[0116] Now, a third embodiment of the present invention will be described below by referring to FIG. 7 . The deformable mirror device 30 of the third embodiment is adapted to deform the mirror surface by directly pushing or pulling the surface of the flexible member 2 on which the intensity distribution pattern 2a is formed by means of a voice coil motor.

[0117] As shown in FIG. 7 , the mirror device 30 has a single circular space 37 in the substrate 4 . The flexible member 2 is bonded to the substrate 4 in such a way that the central axis C of the circular space 37 is aligned with the center of the intensity distribution pattern 2a exhibiting a concentrically arranged circular shape. The voice coil motor 31 is fixed to the substrate 4 in the space 37 .

[0118] The voice coil motor 31 is rigidly fixed in place on the substrate 4 with the central axis of its cylindrical yoke 32 aligned with the central axis C of the space 37 . The cylindrical yoke 32 is provided with a fla...

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Abstract

A deformable mirror device which corrects spherical aberration caused by the difference in thickness of a cover layer covering an optical disk recording layer, wherein a strength distribution pattern (2a) is provided by concentrically forming protrusions on a flexible member (2) formed with a mirror surface (3). An attraction force by an electrostatic force is produced on an upper electrode (8) and a lower electrode (9) according to a voltage application from a drive circuit (10), and a first space (5) expands as much as a second space (7) shrinks to deform the mirror surface into a convex shape. This deforms the shape of the mirror surface into a desired shape capable of correcting spherical aberration by means of the formation pattern of the strength distribution pattern (2a) on the flexible member (2). One drive actuator (10) required for deforming the mirror surface can provides simple constitution and control. The formation pattern of the strength distribution pattern (2a), when properly designed, can deform a mirror surface shape step-wise into a specified shape, permitting spherical aberration correction to each of at least three recording layers of the optical disk.

Description

technical field [0001] The invention relates to a deformable mirror device with a deformable mirror surface, and also relates to a deformable mirror plate. [0002] This application is based on and claims priority from prior Japanese Patent Applications No. 2004-223018 filed on July 30, 2004, No. 2004-319123 filed on November 2, 2004, and No. 2005-129576 filed on April 27, 2005 rights and interests, the entire contents of which are incorporated herein by reference. Background technique [0003] In an optical disc device suitable for recording or reproducing information signals on or from an optical disc used as an information recording medium, a laser beam emitted from a laser beam source is condensed by an objective lens and irradiated onto a signal recording layer of the optical disc to record or reproduce the signal. When a laser beam is irradiated through an objective lens, spherical aberration occurs depending on the thickness of a cover layer covering a recording lay...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/06G02B5/10G02B26/08G11B7/135G11B7/1362G11B7/1392
Inventor 青木直三浦隆博山田正裕
Owner SONY CORP
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