Fourier spectrometer based on dynamic stable scanning technology

Abstract

This invention relates to a fourier spectrometer based on dynamic stable scanning technology<0}. Wherein, it comprises a white light and laser source, an optical system mainly with Michelson interferometer, a feedback module to detect and convert the weak optical signal into electric signal, an A / D control module, an actuator module to control the phase difference of two arms of the interferometer, and a measurement module to detect the feedback and actuator modules for locked phase condition. This invention overcomes the defects in prior art, and can large-stroke continual scan with high precision, resolution and SNR.

Description

technical field [0001] The invention relates to the technical field of optical-mechanical-electrical integration direction micro-displacement control and the field of spectral analysis, and is a large-stroke spectral analysis system capable of realizing laser phase locking control with nanometer precision. technical background [0002] Nanotechnology is one of the most promising emerging disciplines in the 21st century, and its development momentum is very rapid. In the current chip production technology, the diameter of the writing point is required to be 1 nanometer, and the dot pitch is 2 nanometers; the cutting thickness of ultra-thin slices in medical operations is 100±5nm; it has been widely used in various industrial fields at home and abroad The application range of micro-electromechanical systems (MEMS) also ranges from microns to nanometers. The realization of these nanoscale processing and measurement is inseparable from ultra-precise positioning, that is, nanopos...

AI Technical Summary

Problems solved by technology

There are many problems in this way: 1. During the conversion process of the analyzer from stop to rotation, the speed changes, and it takes time to reach a stable value.

2. There is a power drift in the light source, so the measured value has changed from the stop of the measurement to the start of the measurement, and the measurement curve cannot be connected

3. The combination of piezoelectric micro-displacement and stepping motor has great vibration during the conversion process, and it is possible to jump out of a stripe cycle

4. The combination of piezoelectric micro-displacement and stepping motor is difficult to achieve fast scanning. Even at the highest speed, it takes 10 minutes to scan 1um

At present, only a few foreign companies can provide Fourier transform spectrometers. Their technology is relatively mature, and their resolution is less than 0.005cm-1, but the price is very expensive, the maintenance cost is high, and the professionalism is strong, so it is difficult to use it on a large scale in my country.

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