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Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof

An inkjet head and substrate technology, applied in printing and other directions, can solve problems such as the inability to stably perform pattern formation of the upper protective layer

Inactive Publication Date: 2009-06-10
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has been found that there is a problem that stable performance cannot be performed because the upper protective layer may be left unetched, or conversely, since the insulating protective layer may be etched due to unevenness of the device or etching conditions. Patterning of upper protective layer

Method used

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  • Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof
  • Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof
  • Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof

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Embodiment Construction

[0025] figure 1 is an illustrative partial sectional view showing a substrate for an ink jet head to which the present invention is applied.

[0026] exist figure 1 , reference numeral 101 denotes a silicon substrate, and reference numeral 102 denotes a heat accumulating layer made of a thermally oxidized film. Reference numeral 103 denotes an interlayer film made of SiO film, SiN film, etc., which also has a function of accumulating heat, reference numeral 104 denotes a thermal resistance layer, and reference numeral 105 denotes an interlayer film made of such as Al, A metal wiring layer made of metallic materials such as Al-Si and Al-Cu is used as a wiring, and reference numeral 106 denotes a protective layer made of SiO film, SiN film, etc., and the protective layer 106 also serves as an insulating layer. Reference numeral 107 denotes an upper protective layer provided on the protective layer 106 for protecting the electrothermal conversion element from chemical and physi...

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Abstract

The present invention provides a substrate for ink jet including a heating resistor generating thermal energy for discharging an ink from an ink discharge port and an upper protective layer which is formed above the heating resistor and has a contacting surface with the ink. Furthermore, the upper protective layer is made of an amorphous alloy consisting of Ta and Cr in which the content of Ta is more than that of Cr. This constitution allows for the substrate excellent in cavitation resistance and corrosion resistance, and capable of high durability while having similar discharge performance to that of a conventional protective layer made of a Ta film. The present invention further provides an ink jet head comprising the above-mentioned substrate, and a manufacturing method thereof.

Description

technical field [0001] The present invention relates to a substrate for an inkjet head that ejects a functional liquid such as ink to a recording medium including paper, plastic sheet, cloth, article, etc.; an inkjet head using the substrate and a manufacturing method thereof. Background technique [0002] As a conventional structure of an inkjet head for inkjet recording, a structure may be employed in which a plurality of discharge ports, ink flow passages connected to these discharge ports, and a plurality of thermal energy capable of generating ink ejection are provided. electrothermal conversion element. Each electrothermal conversion element has a heating resistor and an electrode for supplying electric energy to the heating resistor, and the electrothermal conversion element is coated with an insulating film to ensure insulation between the various electrothermal conversion elements. Each ink flow channel is connected to the common liquid chamber at its end opposite ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/05
Inventor 坂井稔康齐藤一郎横山宇尾崎照夫
Owner CANON KK
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