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A technology of cover opening device and driving device, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., which can solve the problems of poor safety, low efficiency, and inability to realize automation, and achieve the effect of avoiding reverse transmission motion

Active Publication Date: 2009-08-12
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This mechanism has a narrow scope of use and is only suitable for applications when the weight of the cover plate 2 is small. In addition, due to the need for manpower, the speed is not easy to control, automation cannot be realized, the efficiency is low, and the safety is not strong.

Method used

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Examples

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specific Embodiment 2

[0046] Specific embodiment two, such as Figure 6 As shown, the drive device includes a crank, which is connected to the worm 12, and the worm 12 is driven to rotate by manually turning the crank.

[0047] The crank includes a turntable 18, the center of the turntable 18 is connected with the worm 11, and the edge of the turntable 18 is connected with a handle 19, and turning the handle 19 can drive the worm 11 to rotate.

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PUM

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Abstract

The invention discloses a cover opening device for opening the cover plate of device, which comprises a driving gear, a speed reducing device and an executive device. The driving gear drives the executive device to rotate by the speed reducing device and open the cover plate. The speed reducing device comprises a worm, a worm wheel and a gear set. The driving gear can be an electric motor or be driven by human. The cover opening speed can be adjusted and controlled by the driving gear, and the speed is reduced in large speed ratio by the worm and the worm wheel, thus avoiding the reverse transmitting movement. The invention is of simple structure, convenient operation, adjustable cover opening speed and safe and stable cover opening, so that the invention is particularly applicable to a console cavity cover plate for starting or closing the semi-conductor manufacture device, or applicable to open or close other cover plates of devices.

Description

technical field [0001] The invention relates to an accessory device of equipment, in particular to a cover opening device of semiconductor processing equipment. Background technique [0002] Some components in semiconductor equipment must be opened during maintenance, such as the chamber cover of the platform chamber. When it is necessary to replace and debug the vacuum manipulator inside the chamber or clean the inside of the chamber, the chamber cover needs to be opened. Due to the heavy weight of the chamber cover, it is difficult to complete it by manpower, so mechanical tools must be used to complete the opening. [0003] In the prior art, there are mainly two methods for opening the chamber cover: [0004] one is as figure 1 In the shown cylinder type cover opening mechanism, one end of the connecting rod 3 is connected to the cylinder 1, and the other end is connected to the cover plate 2. The connecting rod 3 drives the cover plate 2 to rise under the action of the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00
Inventor 韦磊
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD