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Hoisting device

A lead screw and semiconductor technology, applied in the direction of hoisting device, hoisting device, etc., can solve the problems of complex device control, poor safety, and large volume of the cylinder 16, and achieve easy operation, simple structure, and avoid reverse transmission of motion. Effect

Active Publication Date: 2011-09-14
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The disadvantage of this pneumatic lifting device is that when the equipment part 11 needs to be displaced relatively large, the volume of the cylinder 16 is relatively large
In addition, the control of the device is complex, precise position control cannot be achieved, and the safety is not strong

Method used

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Embodiment Construction

[0021] The lifting device of the present invention is used for moving equipment components. The equipment components mentioned here mainly refer to equipment components of semiconductor silicon wafer processing equipment, which are arranged on the equipment body of semiconductor silicon wafer processing equipment during operation. Other devices are also possible.

[0022] Its better concrete way is as Figure 5 As shown, it includes a worm 7 and a worm wheel 2. The central axis of the worm wheel 2 is connected with a screw 6, and the equipment parts are engaged with the screw 6. Rotating the worm 7 can drive the screw 6 to rotate and drive the equipment parts to move up and down.

[0023] A deceleration device 3 may also be arranged between the worm wheel 2 and the screw mandrel 6 to slow down the lifting speed of the equipment components.

[0024] In order to stabilize the lifting of the equipment parts, it is better to set the guide rail 8 for the lifting of the equipment p...

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PUM

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Abstract

The invention discloses a lifting device used for moving a device part, including a worm and a worm wheel. The central axis of the worm wheel is connected with a screw rod. The device part is engaged with the screw rod and driven by the screw rod to move up and down. A reduction device is arranged between the worm wheel and the screw rod. The invention also includes a guide rail and a slide block. The slide block is engaged with the screw rod and fixedly connected with the device part. The slide block can be driven by the screw rod to slide along the guide rail. The worm is connected with a dial. The worm wheel and the worm can be driven to rotate through rotating the dial, thereby driving the device part to ascend and descend. The invention has the advantages of simple structure, convenient use as well as safety and reliability. The invention is mainly applicable to a semiconductor silicon chip processing device and also suitable for other devices.

Description

technical field [0001] The invention relates to an accessory device of equipment, in particular to a lifting device of semiconductor silicon chip processing equipment. Background technique [0002] During the maintenance of semiconductor silicon wafer processing equipment, if the parts are assembled and disassembled one by one, the workload will increase and the efficiency will be reduced. Therefore, sometimes it is necessary to remove some parts as a whole. Open or remove device parts such as the upper electrode or chamber cover. As the size of semiconductor silicon wafers becomes larger and larger, the size and weight of the equipment components of the etching machine increase accordingly, and the weight of the moving parts is relatively large, which is difficult to complete directly by manpower, and must be completed by means of a lifting mechanism. The operability, stability, safety and volume of the lifting mechanism must meet the requirements of semiconductor silicon ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B66F19/00
Inventor 王志升
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD