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Washing method for removing polymer film adhered on surface of anode alumimium-oxide part

A technology of polymer film and anodized aluminum, applied in the direction of cleaning methods using liquids, chemical instruments and methods, cleaning methods and utensils, etc., can solve problems such as unsatisfactory cleaning effect, time-consuming and labor-consuming, and easy to damage the sprayed surface , to achieve ideal cleaning effect, less time-consuming and simple operation

Active Publication Date: 2009-12-09
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the characteristics of anodized aluminum parts are different from other metal parts, this method is easy to damage the sprayed surface while removing the polymer, and the cleaning process is time-consuming and labor-intensive, and the cleaning effect is not ideal

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] After removing the anodized aluminum parts from the etching equipment, immediately rinse with water for 20 minutes, and wipe until the dust-free cloth has no color. Then wipe it repeatedly with IPA for 10 minutes until the dust-free cloth has no color. Wipe again with acetone until the lint-free cloth is colorless. Then rinse with water and N 2 blow dry.

[0020] Next, soak the anodized aluminum parts in deionized water at 80°C for 1 hour, and wipe them with a lint-free cloth. Add the solution (NH 4 OH:H 2 o 2 :H 2 O=1:1:2) for 30 minutes, then rinse with water and wipe.

[0021] After immersion is complete, sand the aluminum surfaces exposed during cleaning with 1500-gauge emery paper.

[0022] Then, put the parts into a 25kHz ultrasonic tank for rough cleaning, ultrasonic for 20 minutes, the ultrapure water temperature is 50°C, the ultrasonic energy density is 30 watts / gallon, and a dust-free cloth is placed between the parts and the pallet to prevent watermar...

Embodiment 2

[0029] After removing the anodized aluminum part from the etching equipment, immediately rinse it with water for 30 minutes, and wipe it until the lint-free cloth has no color. Then wipe it with IPA repeatedly for 5 minutes until the dust-free cloth has no color. Wipe again with acetone until the lint-free cloth is colorless. Then rinse with water and N 2 blow dry.

[0030] Next, soak the anodized aluminum parts in 70°C deionized water for 1 hour and wipe them with a lint-free cloth. Add the solution (NH 4 OH:H 2 o 2 :H 2 O=1:1:3) for 35 minutes, then rinse with water and wipe.

[0031] Then, put the parts into a 25kHz ultrasonic tank for rough cleaning, ultrasonic for 30 minutes, the ultrapure water temperature is 50°C, the ultrasonic energy density is 25 watts / gallon, and a dust-free cloth is placed between the parts and the pallet to prevent watermarks.

[0032] After the rough cleaning is completed, put the parts into a 40kHz ultrasonic tank for fine cleaning, ultr...

Embodiment 3

[0038] After removing the anodized aluminum parts from the etching equipment, immediately rinse with water for 25 minutes, and wipe until the dust-free cloth has no color. Then wipe it repeatedly with IPA for 8 minutes until the dust-free cloth has no color. Wipe again with acetone until the lint-free cloth is colorless. Then rinse with water and N 2 blow dry.

[0039] Next, soak the anodized aluminum parts in deionized water at 90°C for 1 hour, and wipe them with a lint-free cloth. Add the solution (NH 4 OH:H 2 o 2 :H 2 O=1:1:3) for 40 minutes, then rinse with water and wipe.

[0040] After immersion is complete, the aluminum surfaces exposed during cleaning are abraded with 2000-gauge emery paper.

[0041] Then, put the parts into a 25kHz ultrasonic tank for rough cleaning, ultrasonic for 25 minutes, the ultrapure water temperature is 50°C, the ultrasonic energy density is 35 watts / gallon, and a dust-free cloth is placed between the parts and the pallet to prevent wa...

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PUM

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Abstract

The invention provides a cleaning method for removing polymer films attached to the surface of anodized aluminum parts, which comprises the following steps: soaking, rough cleaning and fine cleaning. The cleaning method of the invention has simple operation, less time consumption, ideal cleaning effect and little damage to anodized aluminum parts.

Description

technical field [0001] The invention relates to a polysilicon etching process, in particular to a cleaning method for removing a polymer film attached to the surface of anodized aluminum parts. Background technique [0002] In the traditional semiconductor polysilicon gate dry etching process, many by-products will be produced as the reaction proceeds. These by-products will undergo a series of split polymerization reactions in the process environment of the reaction chamber to produce polymers with complex structures. A part of these polymers can be discharged from the reaction chamber by the molecular pump and dry pump along with the airflow of the reaction chamber, and the other part will be attached to the inner wall of the reaction chamber. The polymer film attached to the inner wall will continue to accumulate as the process continues. This film is not stable and may fall off from the inner wall at any time to contaminate the silicon wafer. Therefore, it is necessary ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/04B08B3/12H01L21/00H01L21/3065
Inventor 陶林
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD