Double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope

Abstract

The invention provides a static rotary mini-gyro of double-mode reverse magnetic rotor in the micro mechanic-electro technical field. The invention comprises an upper stator, a rotor and a lower stator. The upper stator is upside looped on the lower stator, and the two front faces of the upper stator and the lower stator face to each other, so a cavity is formed. The rotor is suspended in the cavity. On the front face of the base for the upper stator, a static rotation capacitance pole-plate set for the upper stator is mounted; at back of the upper stator, a cross separation structure and permanent magnets for the upper stator are arranged; on the four areas separated by the cross separation structure for the upper stator, the permanent magnets of the upper stator are adhered. On the front face of the base for the lower stator, a static rotation capacitance pole-plate set and the side static pole pairs for the lower stator are mounted; at back of the lower stator, a cross separation structure and permanent magnets for the lower stator are arranged; on the four areas separated by the cross separation structure of the lower stator, the permanent magnets of the lower stator are adhered. The invention reduces the starting process and controlling difficulty in the starting for the rotor, hence process complexity and control difficulty, and allows the concurrent inspection of the acceleration of a plurality of freedoms.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a dual-mode anti-magnetic rotor electrostatically rotating micro-gyroscope. Background technique [0002] As we all know, micro-mechanical inertial instruments include micro-inertial sensors (micro-accelerometers and micro-gyroscopes) and micro-inertial measurement units (MIMUs, composed of micro-inertial sensors, micro-control circuits, etc.), which are an important class of micro-electromechanical systems. With the development of MEMS technology, inertial sensing devices have become one of the most successful and widely used MEMS devices in the past few years. Mainly driven by the automotive industry, micromachined vibratory mechanical gyroscopes have been extensively studied over the past few years, with significantly improved performance. At the same time, in order to overcome the suspension symmetry structure of vibrating micro-mechanic...

AI Technical Summary

Problems solved by technology

Its shortcoming is that radial control electrodes for controlling the radial (X, Y) position of the rotor are arranged on the radially inner and outer sides of the rotor; Axial control electrodes for axial position suspension control, so that the suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor, and the process is also more complicated

Images