Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic sensitive mass micro-accelerometer

Abstract

A diamagnetic susceptive mass micro-accelerator with cylindrical and multi-ring axially and radially magnetized permanent magnet in the field of a micro-electro-mechanical system is composed of an upper stator, a rotor and a lower stator, wherein a cylindrical and a multi-ring axially magnetized permanent magnet in the upper and the lower stators provide suspension force and lateral stabilizing force to the diamagnetic rotor to achieve control-free self-stabilized initial levitation and suspension. Meanwhile, the axial rigidity, the lateral rigidity and the impact resistance of the micro-accelerator can be improved by axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotor, thus enhancing stabilization and suspension performance and lowering the initial levitation process and the initial levitation control difficulty of the rotor. Accordingly, the micro-accelerator can achieve self-stabilization, less power consumption, convenient implementation and small size, and can detect three axial accelerations in X, Y and Z axes and two angular accelerations around the X and the Y axes without complex control mechanism.

Description

technical field [0001] The invention relates to a micro-accelerometer in the field of micro-electromechanical technology, in particular to a cylindrical and multi-ring axial radial magnetization permanent magnet antimagnetic sensitive mass micro accelerometer. Background technique [0002] The inertial navigation system is an autonomous navigation technology that directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. During the working process, it neither transmits energy to the outside world nor obtains information from the outside. It has unique advantages such as being free from interference, can be used anywhere, has good dynamic performance, and rich navigation output information. It is widely used in the fields of aviation, aerospace and navigation. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems) technology has pr...

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Problems solved by technology

[0004] found through literature search of the prior art, in 2002, R Houlihan and M Kraft of the University of Southampton in the UK in J.Micromech.Microeng. (micromechanical microengineering Magazine, No. 12, 2002, page 495-503, British journal) published an article Modeling of an accelerometer based on alevitatedproof mass (based on the modeling of the accelerometer of the suspension detection mass) proposed disc rotor electrostatic levitation micro accelerometer, this Because the type of micro accelerometer needs to use electrostatic force to overcome the gravity to achieve suspension, it needs a small gap between the rotor and the stator to be able to realize it, so it has high requirements on the process. In addition, they all need a closed-loop feedback control circuit to work normally. The suspension of the rotor requires effective control of multiple degrees of freedom, and the starting and stable suspension of the rotor require complex circuit control, which is difficult

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