Trend monitoring and diagnostic analysis method for vacuum pump and trend monitoring and diagnostic analysis system therefor and computer-readable storage media including a computer program which perf

Abstract

The present invention such as active diagnostic algorithms is developed not only to realize the early detection of degraded vacuum pumps for the protection of pump failure but also to provide their predictive maintenance. According to the present invention, it is possible to find simple and effective ways to deal with technical problems arising from the large variability of the pump-by-pump operation characteristics and the multiple process conditions where pumps run under the idle operation and gas-loaded operation conditions alternately, especially in semiconductor manufacturing process.

Description

technical field [0001] The present invention relates to diagnostic methods for fault protection and maintenance of vacuum pumps, and more particularly, to semiconductor manufacturing processes with multiple operating conditions. Background technique [0002] There is a growing demand for the availability and reliability of vacuum pumps in modern semiconductor manufacturing processes. The reason is that the cost of failed batch production wafers and lost production time becomes higher and higher as the production wafer size becomes larger and larger. Bahnen and Kuhn have addressed the technological need for vacuum pumps for such modern semiconductor processes [Ref 1: R. Bahnen and M Kuhn, "Increased reliability of drypumps due to process related adaptation and pre-failure warning," Vacuum, Vol. 44, No 5-7, pp.709-712, 1993]: High reliability without unscheduled downtime, very low maintenance, high ability to evacuate corrosive and reactive gas mixtur...

AI Technical Summary

Problems solved by technology

However, Wegerich et al. [Reference 3: S.W. Wegerich, D.R. Bell and X.Xu, "Adaptive modeling of changed states in predictive condition monitoring," WO 02 / 057856 A2, 2002]; R.M Pipke, "Dignostic systems and methods for predictive condition monitoring," WO 02 / 086726 A1, 2002] pointed out the disadvantages of threshold warning and alarm schemes based on sensor output: "Traditional techniques do not provide a total change in the operating parameters of a process or machine Responsive, always failing to provide appropriate alerts to prevent unplanned downtime, equipment damage, or tragic safety hazards

However, a time series of normal operating conditions of a new or rehabilitated vacuum pump is obtained only at the very beginning of each specified process, so that the entire range of reference data

Images