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Microengineerd vacuum interface for an ionization system

A micro-fabrication and interface technology, applied in the field of mass spectrometry, which can solve complex and expensive problems

Active Publication Date: 2011-11-09
MICROSAIC SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As such, they are complex and expensive and require significant cleaning and maintenance

Method used

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  • Microengineerd vacuum interface for an ionization system
  • Microengineerd vacuum interface for an ionization system
  • Microengineerd vacuum interface for an ionization system

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Embodiment Construction

[0016] Refer to as Figure 1-8 The illustrated exemplary embodiments describe the invention in detail.

[0017] It is desired to construct or construct a device according to the teachings of the present invention as a stacked assembly of a semiconductor substrate, desirably formed from silicon. Such techniques are known to those skilled in the art of microfabrication. figure 1 denotes a first substrate, which is structured in multiple layers. The first silicon layer 101 is connected to the second silicon layer 102 through a silicon dioxide insulating layer 103 . This material is called bonded silicon-on-insulator (BSOI) and is commercially available in wafer form. A further insulating layer 104 is provided on the outside of the second silicon layer.

[0018] The first silicon layer has or defines a first central hole 105 . The inner side walls 112 of the first layer defining the holes include raised or upstanding formations 106 on the outer side of the first wafer that ar...

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Abstract

A planar component for interfacing an atmospheric pressure electrospray ionizer 507 to a vacuum system such as a mass spectrometer 502 is described. The component combines electrostatic optics with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon. Separately patterned and etched semi-conductor layers are arranged in a stack, the orifices defined in each line-up to provide a channel through the component.

Description

technical field [0001] The present invention relates to mass spectrometry, and in particular to the use of mass spectrometry in combination with liquid chromatography or capillary electrophoresis. More particularly, the present invention relates to microengineered interface devices for mass spectrometry systems. Background technique [0002] Electrospray is a method of coupling ions from a liquid source such as a liquid chromatography or capillary electrophoresis system into a vacuum analysis system such as a mass spectrometer (Whitehouse et al., 1985; US 4,531,056). The liquid is usually a dilute solution of the analyte in a solvent. A spray is induced at the end of a capillary containing a liquid by the action of a strong electric field. The electric field pulls the liquid from the capillary into a Taylor cone, which emits a high velocity spray at a threshold field based on the liquid's physical properties (such as its electrical conductivity and surface tension) and the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J49/04H01J49/02H01J49/10B05B5/025G01N30/72
CPCH01J49/165H01J49/0018H01J49/067
Inventor 理查德・西姆斯理查德・威廉・莫斯利
Owner MICROSAIC SYST