Microengineerd vacuum interface for an ionization system
A micro-fabrication and interface technology, applied in the field of mass spectrometry, which can solve complex and expensive problems
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[0016] Refer to as Figure 1-8 The illustrated exemplary embodiments describe the invention in detail.
[0017] It is desired to construct or construct a device according to the teachings of the present invention as a stacked assembly of a semiconductor substrate, desirably formed from silicon. Such techniques are known to those skilled in the art of microfabrication. figure 1 denotes a first substrate, which is structured in multiple layers. The first silicon layer 101 is connected to the second silicon layer 102 through a silicon dioxide insulating layer 103 . This material is called bonded silicon-on-insulator (BSOI) and is commercially available in wafer form. A further insulating layer 104 is provided on the outside of the second silicon layer.
[0018] The first silicon layer has or defines a first central hole 105 . The inner side walls 112 of the first layer defining the holes include raised or upstanding formations 106 on the outer side of the first wafer that ar...
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