Piezoelectric ceramic sinusoidal excitation acceleration meter calibration method and device

A piezoelectric ceramic, sinusoidal excitation technology, applied in the testing/calibration of velocity/acceleration/shock measurement equipment, velocity/acceleration/shock measurement, measurement devices, etc., can solve the problems of high cost, impact on results, and high equipment cost, Achieving the effect of low cost and simple installation

Inactive Publication Date: 2008-01-09
DALIAN UNIV OF TECH
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Problems solved by technology

For the calibration of the gravity field flip method, it can only achieve the calibration work in the acceleration range of 1g; the precision centrifuge is used to calibrate the accelerometer, which requires a large area of ​​equipment and high cost; More external interference a...

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  • Piezoelectric ceramic sinusoidal excitation acceleration meter calibration method and device
  • Piezoelectric ceramic sinusoidal excitation acceleration meter calibration method and device

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Embodiment Construction

[0009] A specific embodiment of the present invention is described in detail in conjunction with accompanying drawing 1, a kind of accelerometer calibration method of piezoceramic sinusoidal excitation, the accelerometer 1 to be measured is installed on the mounting plate 3 through the mounting screw 2, and the mounting plate 3 is connected with the resin glue The piezoelectric ceramics 4 are connected, and the piezoelectric ceramics 4 are bonded to the base 9 with resin glue, and the sinusoidal excitation device is composed of the piezoelectric ceramics 4 , the mounting plate 3 and the base 9 . A steady-state sinusoidal excitation device composed of piezoelectric ceramics 4 is used to apply a frequency to the positive electrode 7 of the piezoelectric ceramic lead wire of the piezoelectric ceramic 4 and the negative electrode 8 of the piezoelectric ceramic lead wire within the range of the resonant frequency of the accelerometer and the working frequency of the piezoelectric cer...

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Abstract

The invention relates to a method and device for calibrating a piezoelectric ceramic sine-excited acceleration meter, installing a tested acceleration meter by bolt on a sine exciter composed of piezoelectric ceramic and installation disc and applying a sine drive voltage to piezoelectric ceramic so that the sine exciter will make a corresponding sine output shift. And the device is composed of piezoelectric ceramic, installation disc and base, where the piezoelectric ceramic is bonded with the installation disc with resin glue, the piezoelectric ceramic is installed on the base via resin glue. And the device is simple and low-cost.

Description

technical field [0001] The invention discloses an accelerometer calibration method and device for sinusoidal excitation of piezoelectric ceramics, belonging to the field of micromechanical accelerometers in microelectromechanical systems. Background technique [0002] MEMS accelerometer is one of the earliest products developed by MEMS. Its measurement range is from a few μg to tens of thousands of g (g is the unit of gravity acceleration), and it is being used more and more widely. With the development of accelerometers, new requirements are put forward for the calibration of accelerometers. For small-range accelerometers, the gravity field flipping method, impact pendulum impact method and precision centrifuge are often used for calibration; for large-range accelerometers, the impact method is generally used to calibrate the accelerometer, such as Huang Junqin, Gu Jianxiong introduced the dynamic calibration method and device of high-g accelerometer based on transient sho...

Claims

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Application Information

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IPC IPC(8): G01P21/00G01P21/02
Inventor 王涛王晓东佘东生孙屹博王立鼎
Owner DALIAN UNIV OF TECH
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