Filtering device and filtering system used for pinching and processing toxic harmful dust

Abstract

The present invention relates to a filtering device and a filtering system which is connected outward with a vacuum system and is used for collecting and disposing the poisonous and nocuous dust produced in the production process of semiconductor. The prior poisonous dust collecting and disposing method can easily pollute the factory environment and also does harm to the human body. The present invention comprises a main body, a filtering net bracket and a filtering head, wherein, the main body is provided with a cavity, which is used for containing the filtering net bracket; both ends of themain body are respectively provided with an opening, and the front end of the main body is connected with the filtering head; the bottom surface of the filtering net bracket is provided with a through hole, which ensures the inner of the filtering device to form an air flow channel. The present invention can fast and conveniently collect the poisonous dust into a particular filtering net, which not only avoids the flying of the dust, but also prevents the vacuum system from being polluted.

Description

technical field [0001] The present invention relates to the environmental maintenance of wafer foundry, and relates to the collection and treatment of toxic and harmful dust. Specifically, it is a filter connected to a vacuum system for collecting and processing toxic and harmful dust generated in the semiconductor manufacturing process. devices and filtration systems. Background technique [0002] Wafer foundries need to use various chemicals and materials in the semiconductor manufacturing process, and will generate a lot of waste and residual substances, including some toxic dust particles, such as arsenic. These toxic and harmful dust must be collected by the staff first, and can only be discharged to the outside after special treatment. Once disposed of improperly, it will not only affect the environment, but also pose a serious threat to human health. [0003] Usually, the staff use a rag to collect these toxic and harmful dusts together, put them into garbage bags an...

AI Technical Summary

Problems solved by technology

However, since the vacuum system itself does not have the ability to purify toxic and harmful substances, and the vacuum system circulates within the entire FAB range, using this method to deal with toxic dust will pollute the FAB's circulation system, thereby reducing the cleanliness of the FAB

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