Variable shape mirror and optical pickup device having the same
A technology of optical pickup and deformable mirror, applied in beam guiding devices, optics, optical components, etc., can solve the problems of piezoelectric film difficulty, inability to obtain mirror shape, uneven features, etc., and achieve the effect of precise aberration compensation
Inactive Publication Date: 2008-04-16
FUNAI ELECTRIC CO LTD
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Problems solved by technology
When the piezoelectric film is formed in such a wide area, since it is very difficult to uniformly form the characteristics of the piezoelectric film, there is a high possibility that a portion with uneven characteristics will appear in a part of the piezoelectric film
If this portion where the characteristics are not uniform is formed in the piezoelectric film, when the mirror is deformed by driving the piezoelectric film, there may be cases where the desired mirror shape cannot be obtained
In this case, even when the deformable mirror is provided in the optical pickup device, there arises a problem that aberration compensation cannot be accurately performed
Method used
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[0029] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In this regard, the embodiment described here is just an example, and the present invention is not limited to the embodiment described here.
[0030] FIG. 1 is a schematic diagram showing an optical system of an optical pickup device including a deformable mirror according to the present embodiment. In FIG. 1, an optical pickup device 1 is a device that can be used by irradiating a laser beam onto an optical recording medium 23 such as CD, DVD, Blu-ray DVD (which is an advanced DVD with a high capacity) and by Information recorded on the signal recording surface of the optical recording medium 23 is read by receiving reflected light, or information may be recorded on the recording surface by irradiating a laser beam on the optical recording medium 23 . The optical pickup device 1 is equipped with, for example, a laser light source 2 , a collimator lens 3 , a...
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Abstract
A variable shape mirror is composed of a substrate, a lower electrode film which is disposed on the substrate, a piezoelectric film which is disposed on the lower electrode film, an upper electrode film which is disposed on the piezoelectric film, an insulating film which is disposed on the upper electrode film, and a mirror film which is disposed on the insulating film. The lower electrode film, the piezoelectric film, and the upper electrode film function as a driving portion to deform the mirror film. The upper electrode film is divided into a plurality of divided electrodes and the driving portion includes a part which performs main deformation of the mirror film and a part which performs fine adjustment of deformation of the mirror film.
Description
technical field [0001] The present invention relates to a deformable mirror provided to an optical pickup device and the like and capable of changing the shape of the mirror surface, and more particularly, the present invention relates to a structure of a deformable mirror formed of laminated thin films. Furthermore, the present invention relates to an optical pickup device having the deformable mirror configured as described above. Background technique [0002] When using an optical pickup to read or write information on an optical disc such as a CD (Compact Disc), DVD (Digital Versatile Disc), it is desirable that the optical axis of the optical pickup is perpendicular to the disc surface. However, in practice, the optical axis and the disk surface are not always perpendicular to each other as the disk rotates. Therefore, when reading or writing information on an optical disc such as CD, DVD, etc., if the disc surface is tilted with respect to the optical axis, wave aberr...
Claims
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IPC IPC(8): G11B7/135G02B17/00G02B26/08
CPCG11B7/13925G11B7/1362G02B26/06G02B26/0825
Inventor 丁子英树前田重雄小寺秀俊神野伊策
Owner FUNAI ELECTRIC CO LTD