Dry-type vacuum pump
A dry vacuum pump and stator technology, applied in the field of vacuum pumping, can solve the problems of loss of pumping efficiency, affecting the process, troublesome maintenance, etc., and achieve the effects of high vacuum capacity, small size and low cost
Inactive Publication Date: 2012-08-08
NORTHEASTERN UNIV LIAONING
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Problems solved by technology
In addition, in some occasions such as semiconductor factories, the foreline vacuum pumps are generally installed on the next floor of the production workshop, and are connected to the main pump or vacuum chamber through pipelines, which increases the pumping speed of the foreline pump due to the reduced gas conduction. Much larger, so an expensive, high-performance vacuum pump unit must be used
In addition, in some vacuum applications in modern industry, such as solar cell preparation, semiconductor device preparation, small precision experimental equipment, etc., problems such as large space occupation, troublesome maintenance, and loss of pumping efficiency brought by the vacuum pump unit have affected the process. carry out
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Embodiment Construction
[0027] Depend on Figure 1-7 It can be seen that the vacuum pump of the present invention includes an organic base 19, a motor 11 connected to the base 19, a stator disc 8 is provided on the base 19, a rotor disc 7 connected to the motor shaft is provided on the stator disc 8, and a rotor disc 7 is provided on the rotor disc 7. The helical rotor 2 connected with the motor shaft, the gland 3 connected with the stator disc 8 is arranged above the helical rotor 2, the upper plane of the gland 3 is provided with an air inlet 1, the abdomen of the stator disc 8 is provided with an exhaust duct, and the exhaust The channel is connected to the exhaust port 18.
[0028] Among them, the upper plane of the stator disc 8 is provided with several concentric vortex grooves, the lower plane is provided with double-wire parallel-wound ring-type water-cooled pipes 9 , and the abdomen of the stator disc 8 is provided with an exhaust duct.
[0029] The rotor disk 7 has a boss on its upper plan...
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The present invention provides a dry vacuum pump, relating to the vacuum technology, which aims at the disadvantages that the prior vacuum equipment can not fulfill high vacuum and direct exhaustion of atmosphere simultaneously. The dry vacuum pump disclosed by the present invention comprises a base and a motor connected with the base. The pump is characterized in that the base is provided with astator disk which is provided with a rotor disk connected with a motor shaft. The rotor disk is provided with a spiral rotor connected with the motor shaft and a gland connected with the stator disk is arranged on the spiral rotor, an air suction port is arranged on the gland plane, an air exhaustion channel is arranged in the stator disk and the air exhaustion channel is connected with the air exhaustion port. The vacuum pump has the advantages of high vacuum capability, direct air discharge, high efficiency, small size and low cost.
Description
Technical field [0001] The invention is a vacuum technology field. Specifically, it is about dry vacuum pump technology that can reach high vacuum and direct atmosphere. Background technique [0002] In recent years, people have developed a variety of types of dry pumps, which are widely used in various fields of vacuum applications such as semiconductor industry, analysis instruments, electronics and chemical industries.The maintenance of the dry pump or dry pump unit is simple, clean and oil -free, and often the preferred main pump in the vacuum.For example, in the vacuum chamber in the semiconductor industry, 10 generally needs to reach 10 -3 PA or lower vacuum, at this time, you need to configure them with high vacuum units. [0003] Generally speaking, in order to obtain clean high vacuum, people usually choose high -vacuum pumps, such as molecular pumps, diffusion pumps+cold traps, but these high -vacuum pumps can only work in the medium or high vacuum areas.There is a cert...
Claims
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IPC IPC(8): F04C25/02F04C18/02F04C29/12F04C29/04F04C29/02
Inventor 刘坤巴德纯
Owner NORTHEASTERN UNIV LIAONING