Arm driving device and robot used for industrial

Abstract

The invention provides an arm driving device (1) which improves the speed and the precision of arm action. The arm driving device (1) in the invention is provided with: a first arm connected rotatblely with a first joint (2) of a base (9); a second arm (6) connected rotatablely with a second joint (3) of the front end of the first arm (5); a third arm (10) connected with a third joint (4) of the front end of the second arm (6); a first synchronous belt wheel (11) arranged on the first joint (2) side of the first arm (5); a second synchronous belt wheel (12) arranged on the second joint (3) side of the first arm (5); a first synchronous belt (15) hung on between the first synchronous belt wheel (11) and the second synchronous belt wheel (12), and restricting the rotation amount of the second arm (6) when the first arm (5) rotating; at least in total two driving sources (7 and 25) transmitting the rotating power to the first arm (5) and the second arm (6) on the one or both of the firstjoint (2) and the second joint (3).

Description

technical field [0001] The present invention relates to an arm driving device and an industrial robot capable of performing desired telescopic movements by rotating a plurality of connected arms respectively, and more specifically relates to an arm driving device and an arm driving device capable of improving the speed and accuracy of the arm movement. An industrial robot equipped with the arm drive unit. Background technique [0002] An arm driving device that rotates a plurality of connected arms to perform desired telescopic movements, for example, is used to move workpieces such as glass substrates and semiconductor wafers for display devices placed in a box into a film forming device, etc. multi-joint robot. [0003] If such an arm drive device is described in Patent Document 1, for example, image 3 and their symbols, the structure is that a plurality of arms 5, 6 connected by the arm joints 2, 3, 4 to be rotatable is connected, and the rotation generated by the drive...

AI Technical Summary

Problems solved by technology

However, due to the restrictions on the structure of the arm and the restriction on the movement of the arm, the frame structure of the arm cannot be made too thick. Inside

[0008] In addition, in the conventional arm driving device, it is intended to transport a large glass substrate with a certain weight and the like in a fast motion. Especially when the arm position is stopped, the position of the arm sometimes exceeds the specified position and exceeds the limit. It is difficult to improve its motion accuracy, and it is difficult to Returning the dislocated arm to its original position may cause a problem that it cannot be used in the substrate transfer box formed at a narrow pitch in recent years.

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