Control of fluid conditions in bulk fluid distribution systems

Abstract

An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.

Description

technical field [0001] The present invention relates to an apparatus and method for controlling the state of a fluid in a fluid distribution system. More particularly, the present invention provides an improved apparatus and method for controlling ultra-high purity in volumetric fluid distribution circuits supplying process fluids to points of use in semiconductor manufacturing processes or other related applications. Or the pressure of the slurry fluid. Background technique [0002] The manufacture of semiconductor devices is a complex process, often requiring more than 200 steps. Each step requires an optimal configuration of states to obtain a high yield of semiconductor devices. Many steps in these processes require the use of fluids, especially for etching, exposing, plating, and polishing device surfaces during manufacturing. In high-purity fluid applications, the fluid must be substantially free of particulate and metallic impurities to avoid defects in the finishe...

AI Technical Summary

Problems solved by technology

As with pump-pressure vessel systems, the first two factors cause a constant pressure loss in the fluid, although in some applications the pressure loss through the filter increases over time as more particles are trapped

Conversely, a third factor causes fluid pressure to drop from about 5 psi to about 25 psi due to the needs of one or more application points (such as a process tool)

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