Plate type three-dimensional locating/scanning device
A technology of three-dimensional positioning and scanning device, applied in the field of positioning/scanning, can solve the problems of short working distance and unusable optical microscope objective lens, and achieve the effect of small size in Z direction and wide scanning range
Inactive Publication Date: 2010-08-11
BEIHANG UNIV
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Problems solved by technology
Due to the limited space in the Z-direction on the inverted sample stage and the generally short working distance of the optical microscope objective lens, the axial (Z-direction) dimensions of the above-mentioned three-dimensional positioning / scanning devices are relatively large, and there is no light-transmitting hole in the center, obviously Cannot be used in SPM-OM system
Method used
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Embodiment
[0040] A flat plate with 8 piezoelectric ceramic tubes A201-H208, 16 insulating sheets A301-P316, 8 elastic sheets A401-H408, 4 fixing seats A101-D104, a rectangular fixing frame 1 and a sample stage 501 Three-dimensional positioning / scanning device, all piezoelectric ceramic tubes A201~H208 have an outer diameter of 8mm, a length of 35mm, and a wall thickness of 0.5mm. An insulating sheet is bonded to both ends of each piezoelectric ceramic tube, and all insulating sheets are 8.5mm in diameter. mm, 1mm thick circular ceramic insulating sheet, wherein the insulating sheet at the first end of each piezoelectric ceramic tube is bonded to a 12mm×12mm×12mm metal fixing seat, the insulating sheet at the second end is connected to the first end of the elastic sheet Bonding, the second end of the elastic sheet is bonded to the sample stage. The elastic sheet is 28mm long, 6mm wide, and 0.5mm thick. It is a copper sheet. The second ends of the eight elastic sheets are all bonded to the...
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The invention relates to a flat-plate three-dimensional locating / scanning device based on a piezoceramics tube. The structure component of the invention mainly includes a rectangle fixing frame, eight piezoceramics tubes, sixteen insulating sheets, eight elastic sheets, four fixing seats and a sample platform. The two ends of each piezoceramics tube are stuck with one insulating sheet. The insulating sheets arranged at one end and the piezoceramics tubes are fixed on one fixing seat of the rectangle fixing frame; the insulating sheets arranged at the other end are stuck with one end of the elastic sheet. The sample platform in a central position is fixed at the other ends of the eight elastic sheets to form flexible supporting structure. The invention combines and connects four electrodesof the outer walls (or inner walls) of the eight piezoceramics tubes into three pairs of electrodes according to a specific mode, the electrodes of the inner walls (or the outer walls) of the piezoceramics tubes are connected to the ground and three pairs of electrodes are respectively connected with three pairs of drive voltages so as to realize three-dimensional locating and scanning. The invention also has nanometer scanning range and nanometer resolution.
Description
technical field [0001] The invention relates to the technical field of positioning / scanning, in particular to a flat-plate three-dimensional positioning / scanning device, which belongs to scanning probe microscopy technology. Background technique [0002] With the development of science and technology, the key technology of nanopositioning / scanning is urgently needed in the fields of microelectronics engineering, precision engineering, bioengineering and nanotechnology. Especially in the current booming field of nanotechnology, nanopositioning / scanning technology is inseparable from scanning probe microscopy technology, and is one of the core technologies to realize nanoscale imaging, measurement and processing. [0003] Scanning probe microscope (SPM) is an important tool for nanometer detection and characterization, which mainly includes scanning tunneling microscope, scanning force microscope and near-field optical microscope. Since scanning probe microscopes use the prob...
Claims
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IPC IPC(8): G01Q10/00
Inventor 商广义蔡微徐平姚骏恩
Owner BEIHANG UNIV