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Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device
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Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A large-diameter grating, macro-micro drive technology, applied in installation, optics, optical components, etc., can solve the problem of no high-precision large-diameter grating splicing device, etc., and achieve the effect of compact structure, flexible operation and high splicing accuracy.
Inactive Publication Date: 2010-06-23
HARBIN INST OF TECH
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Problems solved by technology
[0006] The purpose of the present invention is to solve the problem that there is no high-precision large-diameter grating splicing device in China and to provide a high-precision large-diameter grating splicing device with parallel macro and micro drives
Method used
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specific Embodiment approach 1
[0010] Specific implementation mode one: combine figure 1 and figure 2 Describe this embodiment, this embodiment is made up of moving grating part 1, fixed grating part 4, five linear drives, two-dimensional motion platform part 7, base 6; Said two-dimensional motion platform part 7 is fixed on the base 6 , the lower end of the moving grating part 1 is ball-hinged with the upper end of the two-dimensional motion platform part 7, the fixed grating part 4 is fixed on the base 6, and the five linear drives are respectively the first X-axis linear drive 2 , the second X-axis linear driver 8, the third X-axis linear driver 9, the first Y-axis linear driver 3, the second Y-axis linear driver 5, the first X-axis linear driver 2, the third X-axis linear driver 9 , The second X-axis linear driver 8 is sequentially arranged on the base 6 along the X-axis direction from top to bottom, and the first Y-axis linear driver 3 and the second Y-axis linear driver 5 are sequentially arranged a...
specific Embodiment approach 2
[0011] Specific implementation mode two: combination figure 1 , image 3 Describe this embodiment, each linear actuator of this embodiment consists of a flexible connecting shaft 10, a micro-motion flexible hinge part 11, a screw base 12, a macro-motion screw 13, a macro-motion stepper motor 14, a flexible coupling 15, The bearing seat component 16, the screw nut 17, the macro-movement locking member 18, the macro-dynamic and static linear guide rail 19, the macro-dynamic and dynamic linear guide rail 20, the driver base 21, and the locking pad 22; the two ends of the flexible connecting shaft 10 are respectively It is connected with the micro-moving flexible hinge part 11 and the screw nut seat 12, and the input end of the macro-moving screw 13 passes through the inner threaded hole of the screw nut seat 12 and the screw nut 17 and the shaft hole of the bearing seat part 16 and the flexible connection. The output end of the shaft device 15 is connected by transmission, the i...
specific Embodiment approach 3
[0012] Specific implementation mode three: combination Figure 4 To describe this embodiment, the macro-movement locking member 18 of this embodiment is provided with an arc-shaped groove 23 . Such a design can ensure proper micro-deformation between the two parts of the macro-movement locking member 18 and the locking pad 22 during locking, so as to realize the locking of the macro-motion movement.
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Abstract
A parallel type macro-micro driven raster splicing device with high precision and big caliber relates to a raster splicing device with high precision and big caliber. The invention can solve the problem that China has no raster splicing devices with high precision and big caliber. A two-dimensional moving platform part (7) is fixed on a base (6); the lower end of a movable raster part (1) is hinged with the upper end of the two-dimensional moving platform part (7); a fixed raster part (4) is fixedly arranged on the base (6); a first X-axle linear driver (2), a third X-axle linear driver (9) and a second X-axle linear driver (8) are arranged on the base (6) from top to bottom along the direction of an X-axle in turn; a first Y-axle linear driver (3)and a second Y-axle linear driver (5) arearranged on the base (6) from top to bottom along the direction of a Y-axle in turn; each linear driver is respectively fixedly connected with the base (6) and the raster part (1). The splicing device has the advantages of compact structure, convenient adjusting, flexible operation and high splicing precision, etc., and can realize the splicing with high precision along the five directions of freedom of motion of the space of the movable raster and a static raster in a large area.
Description
technical field [0001] The invention relates to a high-precision large-diameter grating splicing device, which belongs to the technical field of optical mechanical motion positioning. Background technique [0002] With the rapid development of science and technology, diffraction gratings are gradually being used more and more widely, and the demand for large-area high-precision diffraction gratings is also increasing. At present, my country has successively carried out some large-scale scientific and engineering projects such as synchrotron radiation beamlines, laser nuclear fusion, LAMOST astronomical telescopes, and infrared solar tower spectrometers. In these projects, it is urgent to develop high-quality large-area diffraction gratings. For example, in the "Shenguang" series of laser fusion projects being carried out in my country, the use of chirped pulse amplification technology (CPA) makes it possible to obtain ultrashort pulses with higher energy and higher intensity...
Claims
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Application Information
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