Unlock instant, AI-driven research and patent intelligence for your innovation.

Device for installing and leveling photo-etching machine projection objective

A technology of projection objective lens and leveling device, which is applied in the direction of photolithography exposure device, installation, microlithography exposure equipment, etc., can solve problems such as complex structure and tedious leveling process, and achieve the effect of over-constraint

Active Publication Date: 2010-07-21
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a leveling device for installing a projection objective lens of a lithography machine, which can overcome the problems of the cumbersome leveling process of the leveling device for grinding pads and the complex structure of the leveling device for two-way screw thread adjustment. problems, and at the same time reduce the damage caused by external vibration and shock to the projection objective lens

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device for installing and leveling photo-etching machine projection objective
  • Device for installing and leveling photo-etching machine projection objective
  • Device for installing and leveling photo-etching machine projection objective

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0011] Please refer to FIG. 1 , the projection objective lens mounting and leveling device of a lithography machine according to the present invention is used for leveling a projection objective lens 2 with a mounting flange. The leveling device includes a mounting substrate 1, a flexible block 3, a fixing piece and a mounting piece. The front end of the flexible block 3 is rigidly connected to the mounting flange of the projection objective lens 2 through a fixing member, and the base of the flexible block 3 is mounted on the mounting substrate 1 through a mounting member. Please refer to FIG. 2 for a detailed structural diagram of the flexible block 3 . The middle part of the front end of the flexible block 3 is axially provided with a first long and narrow slot 21 , and the rear end of the flexible block 3 is provided with a second long and narrow slot 32 in a direction opposite to the first long and narrow slot 31 . The flexible block 3 also includes two protruding force-...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a projection objective installment leveling device of optical engraver, for leveling the projection objective with a mounting flange. The invention comprises a mounting baseboard, three flexible blocks, a mounting component and a fixer, wherein the front end of the flexible block via the fixer is connected with the mounting flange of the projection objective, the base of the flexible block via the mounting component is mounted on the mounting baseboard, the middle of the front end of the flexible block is provided with a first narrow elongated groove, while the back endis provided with a second narrow elongated groove at the same direction of the first narrow elongated groove, the back end of the flexible block is mounted with an adjusting rod. The leveling device uses three flexible blocks uniformly distributed on one circumference, the front end of the flexible block can be lifted up and down via adjusting the adjusting rod of the flexible blocks to adjust the horizontal level of the projection objective, and the flexible point formed by the two narrow elongated grooves can eliminate external vibration and impact on the projection objective.

Description

technical field [0001] The invention relates to the field of installation and leveling devices for lithography machines, in particular to a leveling device using flexible blocks that can be used to level the projection objective lens of a lithography machine. Background technique [0002] For the manufacturing process of large-scale integrated circuits, projection lithography is the most critical process, and a projection lithography machine is required, and the projection objective lens is the core of the projection lithography machine, and its performance directly determines the graphic transfer of lithography. ability. In order to ensure that the projection objective lens has a good image transfer capability, the corresponding projection objective lens will have a high installation accuracy requirement. The installation requirements for the projection objective include the leveling accuracy requirements for the top plane of the projection objective. [0003] Usually, th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G02B7/02
Inventor 唐海明朱岳彬
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD