Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency

Abstract

The invention relates to a device which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a bulk acoustic wave of the piezoelectric layer (32) is induced with a resonant frequency via the electrodes. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element that is configured as a thin layer.

Description

technical field

[0001] The invention relates to a device comprising at least one piezoelectric acoustic resonance element having a piezoelectric layer and two electrodes arranged on the piezoelectric layer, wherein the piezoelectric acoustic resonance element This is achieved by applying an alternating voltage across the device to excite the piezoelectric layer to perform bulk vibration at a resonant frequency. The invention also relates to a method of manufacturing such a device and a method of outputting a signal dependent on the resonant frequency. Background technique

[0002] This type of piezoacoustic resonant element, in which the piezoacoustic layer is excited to longitudinally vibrate (Dickenschwingung) at the resonant frequency (Dickenschwingung), ie overall vibration (Koerpervolumenschwingung) by applying an alternating voltage field, is called "Bulk Acoustic Wave (BAW) ) piezoelectric resonators", and were first developed for high-frequency applications in commun...

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