Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency

A technology of acoustic resonance and resonance frequency, which is applied in the field of manufacturing such devices, can solve problems such as material composition or overall structure limitations of components, and achieve the effects of low additional cost, complete temperature regulation, and reasonable manufacturing process

Active Publication Date: 2008-09-03
拜奥曼西欧有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0023] But this solution is inherently flawed as it imposes constraints regard

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  • Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency
  • Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency
  • Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency

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Embodiment Construction

[0071] figure 2 The structure of an embodiment of the device of the present invention is shown. The device 1 according to the invention thus comprises a piezoacoustic resonant element 2 , a temperature acquisition device 3 , an analysis device 4 for determining the resonance frequency of the piezoacoustic resonator element 2 , and for measuring values ​​supplied from the temperature acquisition device 3 Analytical means 5 for determining the temperature. In this embodiment, the measured value is the resistance of the temperature acquisition device 3 . But the present invention is not limited thereto. Instead, any temperature measuring devices or similar devices for measuring temperature disclosed in the prior art may be used as long as they can be integrated with the piezoelectric acoustic resonance element according to the process.

[0072] exist figure 2 The analyzing device 4 for determining the resonance frequency is integrated in the device 1 in the embodiment of the ...

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Abstract

The invention relates to a device which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a bulk acoustic wave of the piezoelectric layer (32) is induced with a resonant frequency via the electrodes. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element that is configured as a thin layer.

Description

technical field [0001] The invention relates to a device comprising at least one piezoelectric acoustic resonance element having a piezoelectric layer and two electrodes arranged on the piezoelectric layer, wherein the piezoelectric acoustic resonance element This is achieved by applying an alternating voltage across the device to excite the piezoelectric layer to perform bulk vibration at a resonant frequency. The invention also relates to a method of manufacturing such a device and a method of outputting a signal dependent on the resonant frequency. Background technique [0002] This type of piezoacoustic resonant element, in which the piezoacoustic layer is excited to longitudinally vibrate (Dickenschwingung) at the resonant frequency (Dickenschwingung), ie overall vibration (Koerpervolumenschwingung) by applying an alternating voltage field, is called "Bulk Acoustic Wave (BAW) ) piezoelectric resonators", and were first developed for high-frequency applications in commun...

Claims

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Application Information

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IPC IPC(8): H03H9/05G01N29/02
CPCG01N29/022G01N29/036G01N2291/0256G01N2291/02881G01N2291/0423G01N2291/0426H03H9/02102Y10T29/42
Inventor R·加布尔M·施雷特
Owner 拜奥曼西欧有限公司
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