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X-ray tomosynthesis device

A synthesis device, X-ray technology, applied in X-ray tubes, X-ray tube electrodes, X-ray tube cooling, etc., can solve the problems of increasing manufacturing costs, and achieve the effect of firm structure, favorable price and high image quality

Inactive Publication Date: 2008-10-08
COMET INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The drawback of these devices is also that considerable mass must be moved with high precision
In addition, the required reflective optics require considerable mechanical expense, thus increasing manufacturing costs

Method used

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  • X-ray tomosynthesis device
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  • X-ray tomosynthesis device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0071] figure 1 Shown is the multilayer circuit board 2 when photographed and inspected by X-ray imaging. The multilayer circuit board 2 has solder connections on different planes 4 and 6, the solder connections being in the form of solder balls, e.g. figure 1 Two solder balls 8 and 10 are shown in , where solder ball 8 has the defect of air bubbles 12 , 14 .

[0072] For the photographic inspection of the multilayer printed circuit board 2 , the printed circuit board is transmitted with x-rays, which are generated by an x-ray source whose focal spot 15 lies on the focal spot plane 16 . When the solder balls 8 , 10 are transmitted through, a transmission image 18 , 20 is produced which is received by the detector at the detector plane 22 . In this case transmission images 24 , 26 of gas bubbles 10 , 12 are produced.

[0073] From figure 1 As can clearly be seen in , the transmission images 18 , 20 of the solder balls 8 , 10 overlap on the detector plane 22 . Therefore, al...

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PUM

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Abstract

Disclosed is an x-ray tomosynthesis device (36) comprising means of directing a particle beam of electrically charged particles onto a target (42) which emits x-radiation for radiographing a sample (2) to be analyzed when the electrically charged particles impinge the target (42). The target (42) is provided with at least one supporting element (46) on which a plurality of spaced-apart target elements (48 to 54) are disposed, each of which covers the supporting element (46) only in part. Furthermore, deflection elements are provided which allow the particle beam to be deflected in order to impinge the target elements (48 to 54).

Description

technical field [0001] The present invention relates to an X-ray tomographic comprehensive synthesis device as stated in the preamble of claim 1 . Background technique [0002] Such devices are generally known in the industry and are used for photographic inspection of, for example, electronic components, flat panel assemblies or circuit boards. [0003] Due to the principle of X-ray layered photography or tomographic synthesis method, the X-ray source needs to move relative to the object to be photographed and inspected. The technical details of the X-ray laminography or tomographic composite synthesis method are generally known to those skilled in the art from, for example, DE 103 08 529 A1, so no further elaboration will be given here. [0004] According to DE 103 08 529 A1, a known X-ray tomography comprehensive synthesis device includes: an X-ray tube with an X-ray source, used to generate X-rays, and scan and transmit the object to be photographed and inspected; Phot...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/223
CPCH01J35/30H01J2235/1291H01J2235/1204H01J35/12H01J2235/086G01N23/046H01J35/14H01J35/18H01J2235/186G01N2223/419G01N23/044H01J35/186H01J35/153G01N23/223
Inventor 阿尔弗雷德·赖因霍尔德
Owner COMET INC