Dust collecting device

Abstract

The present invention provides a dust collector which enhances the dust removing performance of the recessed and protruded part of a workpiece. The dust collector includes a dust removing head (100) for protrusion, which has air discharge chambers (104, 105), an air suction chamber (106), a nozzle hood (114) having an internal space communicating with the air discharge chambers (104, 105), and an air suction tube (115) concentrically placed inside the nozzle hood (114) and having an air suction opening (116) communicating with the air suction chamber (106). An air discharge opening (118) is formed by a gap between the forward end of the nozzle hood (114) and the forward end of the air suction tube (115). A protrusion (301) of a workpiece (300) is placed inside the air suction opening (116), air is discharged toward the protrusion (301) from the air discharge opening (118), and the air is sucked from the air suction opening (116). Except a discharge nozzle (220), a dust removing head (200) for recess is similarly formed and the dust removing heads (100, 200) constitute a dust removing device.

Description

technical field [0001] The present invention relates to a dedusting device most suitable for removing dust from concave and convex portions of a workpiece (object to be dedusted). Background technique [0002] Various dust removal devices are currently available, for example, in the manufacturing process of various sheets of liquid crystal panels or plasma display panels, etc., discharge clean air or air vibrating with ultrasonic waves to the surface of the workpiece, suck and remove dust detached from the surface of the workpiece, etc. particle. In addition, there is also known a dust removal and static removal device that removes dust and static electricity from the surface of a workpiece after ionizing the air. [0003] For example, the dust removal device disclosed in Patent Document 1 has: an air discharge cavity, which has an air discharge port with a built-in ultrasonic generator; and an air suction cavity, which is adjacent to the air discharge cavity and has an air...

AI Technical Summary

Problems solved by technology

[0007] The above-mentioned existing dust removal device has the effect of removing dust on the surface of the workpiece uniformly and stably. However, it is assumed that the workpiece itself is flat or sheet-shaped, and the surface of the dust removal target is also flat.

[0008] For workpieces with concave and convex parts on the surface or inner surface, because these concave and convex parts become obstacles, the distance between the dust removal head and the surface of the dust removal object cannot be kept constant, and the air turbulence is caused by the concave and convex parts, so it is impossible to obtain The problem of effective dust removal

In particular, when such a workpiece is used in a clean space such as a clean room, there is a problem that the dust adhering to the concave and convex parts will adhere to the parts and products of the manufacturing line, reducing the rate of qualified products.

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