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Parfocalization checking procedure and parfocalization checker

An inspection instrument and parfocal technology, which is applied in the direction of testing optical performance, etc., can solve the problem that the parfocal accuracy is not particularly high

Active Publication Date: 2010-10-06
南京东利来光电实业有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the error of the human eye, the parfocal accuracy of this inspection method is not particularly high

Method used

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  • Parfocalization checking procedure and parfocalization checker
  • Parfocalization checking procedure and parfocalization checker
  • Parfocalization checking procedure and parfocalization checker

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Embodiment Construction

[0019] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0020] figure 1 In the shown parfocality tester, the objective lens holder 1 is set on the frame 2 . There is a dovetail groove on the top of the objective lens holder 1 (see figure 2 ). The dovetail slot is provided with an objective lens connecting slider 3 (see image 3 ). The center of the objective lens connecting slider 3 is provided with a threaded hole 31 to be connected with the objective lens 4 to be inspected. The outside of the objective lens connecting slider 3 is a dovetail slide rail 32 corresponding to the dovetail groove. The axial direction of the dovetail groove on the objective lens holder is perpendicular to the axial direction of the objective lens 4 under inspection. The dovetail groove can be inserted into the objective lens connecting slider 3 of threaded holes of different sizes according to requirements in th...

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PUM

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Abstract

The invention aims to provide a focusing examination method and a device thereof, which can improve the accuracy of focusing examination. The focusing examination method uses the totem formed by parallel light for transmission through a semi-transmitting and semi-reflecting prism, and then form images on the focal plane through the examined objective; the image captured by the reflector which moves along the shaft of the examined objective is used as a reflecting totem to reflect the examined objective; the image is turned by the semi-transmitting and semi-reflecting prism after passing through the examined objective, and then enters an ocular, so that the reflecting totem can form images in human eyes; the position of the movement of the reflector along the shaft of the examined objective can be regulated so that the reflecting totem can form clear images; the focusing degree of the examined objective is judged according to the relevant distance of the reflector to the standard focusing position.

Description

technical field [0001] The invention relates to a parfocal inspection method and a parfocal inspection device of a microscope. Background technique [0002] The objective lens of the microscope has a complex structure and precise manufacturing. Due to the correction of object aberration, the metal objective lens barrel is composed of fixed lens groups separated by a certain distance. There are many specific requirements for the objective lens, among which parfocal is an important inspection item. Parfocality means that during the microscope inspection, when the image is observed clearly with an objective lens of a certain magnification, when the objective lens of another magnification is converted, the image should be basically clear. The parfocal performance is an important indicator of the quality of the microscope. [0003] The principle of the original parfocal inspection instrument is as follows: Figure 6 , the light source 1 is focused on the cross reticle 3 of the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
Inventor 赵跃东
Owner 南京东利来光电实业有限责任公司