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Feed gear with auxiliary feeder

A technology of feeding device and feeding mechanism, which is applied in the direction of conveyor objects, transportation and packaging, etc., can solve the problems of poor driving stability of the cylinder, large inertia, impact of driven components, etc., and achieve the effect of stable operation and good stability

Active Publication Date: 2012-07-04
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The feed mechanism in the prior art has at least the following disadvantages: the stability of the cylinder drive is poor, and the cylinder has a large inertia at the moment of starting the air supply, and there is a large impact on the driven element in an instant

Method used

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  • Feed gear with auxiliary feeder
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Embodiment Construction

[0010] The feed mechanism with auxiliary feed device of the present invention, its preferred embodiment is as follows figure 1 As shown, it includes a cylinder 6, the front end of the piston rod 5 of the cylinder 6 is connected with an auxiliary feed device, and the front end of the auxiliary feed device is a feed execution end.

[0011] Described auxiliary feed mechanism can be gear, rack mechanism, specifically comprises upper rack 4, gear 3, lower rack 2, and described gear 3 is arranged between upper rack 4 and lower rack 2 and respectively with The upper rack 4 meshes with the lower rack 2. The front end of the piston rod 4 is connected to the rear end of the upper rack 4, and the front end of the lower rack 2 is the feed execution end.

[0012] The auxiliary feeding mechanism may also be other mechanisms, such as damping oil cylinders and the like.

[0013] The feed execution end is provided with a mounting hole, and a positioning pin 1 is provided in the mounting hole...

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Abstract

The invention discloses a feeding mechanism provided with an auxiliary feed apparatus, comprising a cylinder; the front end of a piston rod of the cylinder is connected with the auxiliary feed apparatus; the auxiliary feeding mechanism comprises an upper rack, a gear and a lower rack; the gear is arranged between the upper rack and the lower rack and is respectively engaged to the upper rack and the lower rack; the front end of the lower rack is a feeding execution end; by the combination type of the cylinder and the gear and rack, damping and auxiliary feeding effect can be played on the motion of the piston rod, and the running of the feeding execution end is stable and has good stability; the feeding mechanism of the invention is mainly applied to the feeding mechanism of semiconductorprocessing equipment.

Description

technical field [0001] The invention relates to a semiconductor processing equipment, in particular to a feeding mechanism in the semiconductor processing equipment. Background technique [0002] The raw materials (wafers) in the semiconductor processing equipment need to be loaded from the front end, and the wafers are placed in the wafer box and loaded into the front end together, which results in the loading and unloading of the wafer box, that is to say, the wafer is put into the wafer box first, Then the wafer box is loaded into the wafer magazine of the semiconductor processing equipment, and then the manipulator of the semiconductor processing equipment comes to take away the wafers one by one, and carries out subsequent wafer transfer and processing work, and the finished wafer is put back into the wafer box, and then The wafer cassette is then unloaded to complete a set of procedures. This just needs a kind of stable feeding mechanism, realizes the loading and unlo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
Inventor 朱常青
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD