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Method of removing hard coating film

A technology of hard coating and stripping, applied in coating, metal material coating process, ion implantation plating, etc. It can improve the adhesion strength, inhibit the fragility, and reduce the shape change and dimensional change.

Inactive Publication Date: 2011-06-15
OSG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Moreover, when such a body is coated with a hard coating, the adhesion is damaged due to the fragility of the surface, and the original coating performance (durability, wear resistance, etc.) cannot be obtained, or the edge of the blade becomes deformed. Round results in reduced cutting performance

Method used

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  • Method of removing hard coating film
  • Method of removing hard coating film

Examples

Experimental program
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Effect test

Embodiment

[0037] Embodiments of the present invention will be described below with reference to the drawings.

[0038] figure 1 It is a schematic configuration diagram of a hard coating film stripping device 10 that can strip a hard coating film according to the method of the present invention. It utilizes an ion beam etching device, and a hard coating film coating processing tool 12 passes through a chuck 14 to The centerline S thereof is arranged concentrically on the rotary table 18 in the etching processing container 16 . The hard coating film coating processing tool 12 is equivalent to the hard coating film coating part, and the figure shows the situation of the end mill, such as figure 2 As shown, a shank 22 and a blade portion 24 are integrally provided on a tool base material 20 made of cemented carbide. The edge portion 24 is provided with a peripheral edge 26 and a bottom edge 28 as cutting edges, and the surface of the edge portion 24 is coated with a hard coat 30 by PVD c...

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Abstract

The invention provides a film removing method for a hard coating film. The hard coating film (30) is efficiently etched with a beam of krypton ions, which have a relatively large mass, in a step (S2) and then slowly etched with a beam of argon ions, which have a small mass, in a step (S3) as shown in figure 3. Thus, film removal can be carried out in a short time while minimizing influences (shape change and dimensional change) on the tool base (20). Since krypton and argon each is an inert gas, chemical corrosion of the tool base (20) and resultant surface embrittlement are nil even when thesurface of the tool base (20) is exposed. When this tool base (20) is recoated with a hard coating film (30) to produce a regenerated hard-film-coated processing tool (12), the hard coating film (30)is adherent thereto at an excellent adhesion strength.

Description

technical field [0001] The present invention relates to a method for stripping hard coating films such as TiAlN and TiCN, in particular to a method for stripping hard coating films without damaging the body as much as possible. Background technique [0002] It is known that the surface of the body is coated with carbides, nitrides, carbonitrides of metals of Group IIIb, IVa, Va or VIa of the periodic table of elements, or a hard coating formed by their mutual solid solution. Hardcoated hardcoated parts. It is proposed in Patent Document 1 and the like that, for example, in processing tools such as end mills, taps, drills, and turning tools, at least a cutting edge or the like is provided on the surface of a tool base material (body) made of cemented carbide. In the processing part, the processing tool is coated with a hard coating film obtained by coating the above hard coating film with a PVD (Physical Vapor Deposition) method such as an ion plating method. [0003] In ad...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/02B23P15/28B23K15/00B23K101/20
CPCB23K17/00B23K15/08C23F4/04G21K5/04H01J37/3056H01L21/302
Inventor 羽生博之福井康雄
Owner OSG
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