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Matcher and matching method thereof

An impedance matcher, a technology of matching impedance, applied in the direction of electrical components, plasma, etc., can solve the problems of mutual influence of variable impedance components, good matching path, fast matching speed, etc., to avoid coupling problems, simplify design, and improve matching efficiency effect

Active Publication Date: 2009-05-20
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

[0011] The technical problem to be solved by the present invention is to provide a brand-new radio frequency impedance matcher and a specific method for impedance matching, which can well solve the problem of mutual influence of two variable impedance elements and control coupling in the adjustment process; and the matching path OK, fast matching

Method used

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  • Matcher and matching method thereof
  • Matcher and matching method thereof

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Embodiment 400

[0059] refer to image 3 , which shows an embodiment 400 of another radio frequency impedance matching device of the present invention, which may specifically include the following components:

[0060] The input impedance sensor 401 is used to detect the input impedance of the matching network;

[0061] Load impedance sensor 402, used to detect the load impedance in the matching network;

[0062] Impedance element sensor 403, used to detect the current impedance value of the variable impedance element;

[0063] A controller 404 comprising a matching impedance calculation unit 4041 and an adjustment amount calculation unit 4042; the matching impedance calculation unit 4041 is used to, when the input impedance does not match the output impedance of the radio frequency generator, according to the load impedance and the output impedance The impedance is calculated to obtain the matching impedance value of the variable impedance element; the adjustment amount calculation unit 404...

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Abstract

The invention provides a radio frequency impedance matcher, which comprises a first sensor, a second sensor, a controller and an executive device, wherein the first sensor is used for detecting input impedance of a matching network; the second sensor is used for detecting load impedance of the matching network; the controller comprises a current impedance calculating unit, a matching impedance calculating unit and an adjustment calculating unit, wherein the current impedance calculating unit is used for obtaining a current impedance value of a variable impedance element through calculation according to the input impedance and the load impedance, the matching impedance calculating unit is used for obtaining a matching impedance value of the variable impedance element through calculation according to the load impedance and output impedance when the input impedance is not matched with the output impedance of a radio frequency generator, and the adjustment calculating unit is used for obtaining adjustment required by the variable impedance element through calculation according to the current impedance value and the matching impedance value of the variable impedance element; and the executive device is used for adjusting the variable impedance element according to the adjustment. The radio frequency impedance matcher can avoid coupling problem and improve matching efficiency.

Description

technical field [0001] The technical field of transmission line impedance matching of the present invention, in particular, relates to a radio frequency matcher and a method for impedance matching thereof. Background technique [0002] Impedance matching refers to a working state in which the load impedance and the internal impedance of the excitation source are adapted to each other to obtain the maximum power output. Impedance matching is a part of microwave electronics. It is mainly used on transmission lines to achieve the purpose that all high-frequency microwave signals can be transmitted to the load point, and no signal will be reflected back to the source point, thereby improving energy. benefit. [0003] For example, in a typical RF (Radio Frequency, radio frequency) plasma generator, an RF generator with a constant output impedance (usually 50Ω) generates an RF wave with a fixed frequency (usually 13.56MHz) to provide RF power to the plasma chamber , to excite pl...

Claims

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Application Information

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IPC IPC(8): H05H1/46
Inventor 武晔
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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