A method for making nanoscale graphics

A nanoscale, graphic technology, applied in the direction of manufacturing microstructure devices, photolithographic process of patterned surface, process for producing decorative surface effects, etc., can solve the problems of focused electron beam affecting resolution and high cost, and achieve high resolution, resolution of high cost, low cost effects
CN101441410BActive Publication Date: 2011-12-07新疆中科丝路物联科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
新疆中科丝路物联科技有限公司
Publication Date
2011-12-07

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Abstract

The invention discloses a method for making nanoscale graphics. The nanoscale graphics convert graphic data into binary signals to control the movement of the two-dimensional x-y direction of the micro-movement table and the loading of the metal tip voltage, and use the electrons generated after the tip is loaded with voltage. The beam is exposed to the electron resist, including: coating a layer of electroresist film on the surface of the sample, fixing the metal microtip on the micro-movement stage; loading the sample coated with the electroresist film on the Keep a certain distance from the micro-tip on the micro-motion table; place the micro-motion table loaded with metal tips and samples into the vacuum cavity, and use the vacuum pump to evacuate the cavity; use software programming to convert the processed graphic data into Binary signal, use the binary code to control the micro-motion stage to move in the two-dimensional x-y direction, and apply voltage to the metal microtip, and expose the electronic resist through the low-energy electron beam emitted by the tip under a strong electric field; The samples were developed and fixed. The invention effectively solves the problems of high cost of immersion lithography and proximity effect of focused electron beams affecting resolution.
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Description

technical field

[0001] The invention relates to the technical field of deep submicron and nanometer processing in microelectronic technology, in particular to a method for making nanometer-scale graphics by using electron beams generated by field emission. Background technique

[0002] With the rapid development of the semiconductor industry, the feature size of the device has comprehensively entered the nanometer scale from deep submicron. The ability of nanoscale pattern processing has become the key to determine that integrated circuits continue to advance downwards according to Moore's law. At the same time, with the vigorous rise of nanoscience, nanoscale pattern processing has become the basis for the development of nanotechnology.

[0003] At present, immersion lithography technology and focused electron beam lithography are generally used to realize nanoscale pattern processing. However, the above-mentioned immersion lithography technology has the problem of high i...

Claims

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