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Etchant combination for circuit of liquid crystal device of pattern thin film transistor

A technology of composition and etchant, applied in the direction of surface etching composition, chemical instrument and method, etc., capable of solving problems such as glass corrosion and browning

Active Publication Date: 2011-09-14
DONGJIN SEMICHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, although an etchant including a fluorine-based compound is disclosed, the use of the fluorine-based compound causes corrosion of the glass used as the substrate, and the use of the Fe-based compound causes a browning phenomenon

Method used

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  • Etchant combination for circuit of liquid crystal device of pattern thin film transistor
  • Etchant combination for circuit of liquid crystal device of pattern thin film transistor
  • Etchant combination for circuit of liquid crystal device of pattern thin film transistor

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Embodiment Construction

[0017] The present invention will now be described more fully with reference to the accompanying drawings, in which illustrative embodiments of the invention are shown.

[0018] The etchant composition according to the present invention comprises, based on the total weight of the etchant composition, 45% to 70% by weight of phosphoric acid, 1.5% to 6% by weight of nitric acid, 10% to 30% by weight of acetic acid, 0.1% by weight % to 1.999% by weight of sulfuric acid compound, 0.01% to 3% by weight of Mo etch control agent, and the rest is water.

[0019] When etching a metal layer (such as Mo single layer, Mo / AlNd double layer or Mo / Al / Mo triple layer) in a single etching process, the Mo etching control agent selectively controls the etching rate of the etchant composition for Mo, so that A difference in etching rate caused by different oxidation characteristics of the Al layer and the Mo layer can be prevented and an appropriate etching profile can be obtained. Examples of M...

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Abstract

The present invention provides an etchant composition used for etching metal layer of electrodes for forming thin film transistor-liquid crystal device (TFT-LCD). The etchant composition contains 45-70wt% of phosphoric acid, 1.5-6wt% of nitric acid, 10-30wt% of acetic acid, 0.01-3wt% of Mo etching control agent, 0.1-1.99wt% of sulphate, and the left is water. The etchant composition for the TFT-LCD is suitable for wet-etching Mo single-layer composing the source / drain electrode and Mo / AlNd double-layer composing the grid electrode or Mo / Al / Mo three-layer in absence of side etching or projection condition, and providing excellent taper etching. In addition, the production process is simplified, the production ability is improved and the production cost is reduced because dry-etching is notused. Further, the excellent taper may be even acquired by one-time of wet-etching Mo single-layer, Mo / AlNd double-layer and Mo / Al / Mo three-layer without using environmentally harmful material (for example perchlorite, unsteady material reducing life of the etchant composition or fluorin based compound etching glass as substrate).

Description

technical field [0001] The present invention relates to an etchant composition for etching a metal layer for forming an electrode of a thin film transistor-liquid crystal device (TFT-LCD), and more particularly to an etchant composition providing Etchant composition with excellent tapered etch profile for wet etching Mo single layer constituting source / drain or Mo / AlNd double layer constituting gate in a single process without undercutting and protrusion phenomenon layer or Mo / Al / Mo three layers. Background technique [0002] A liquid crystal display (LCD) device has high resolution and displays clear images. In addition, LCD devices have low power consumption. In addition, LCD devices can be made thinner. Due to these advantages, among flat panel display devices, LCD devices have received much attention. The LCD device is driven by a circuit such as a thin film transistor (TFT). In general, a TFT-LCD forms pixels on a display screen. In a TFT-LCD, a TFT acts as a swit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F1/16
CPCC09K13/06C23F1/16C23F1/20C23F1/26
Inventor 金南绪姜东浒李骐范曹三永
Owner DONGJIN SEMICHEM CO LTD