Extensive angle measuring method for inclination angle of plane moving mirror in Fourier spectrometer

Abstract

The invention discloses an extensive angle measuring method for an inclination angle of a plane moving mirror in a Fourier spectrometer, which is used in the Fourier spectrometer of which moving mirroThe invention discloses an extensive angle measuring method for an inclination angle of a plane moving mirror in a Fourier spectrometer, which is used in the Fourier spectrometer of which moving mirrong the phases within [0, 2phi) so as to obtain a phase difference; adjusting the phase difference by reasonably setting a threshold value; and finally calculating the inclination amount of the movinting the phases within [0, 2phi) so as to obtain a phase difference; adjusting the phase difference by reasonably setting a threshold value; and finally calculating the inclination amount of the moving mirror according to the relation of the phase difference and the inclination angle of the moving mirror. The method can achieve overall high-precision extensive measurement of the inclination angleg mirror according to the relation of the phase difference and the inclination angle of the moving mirror. The method can achieve overall high-precision extensive measurement of the inclination angleof the moving mirror.of the moving mirror.r is a plane mirror, and provides accurate feedback quantity for dynamic calibration control. By inverting the phase delay of each reference laser detection element signal in real time, the method mear is a plane mirror, and provides accurate feedback quantity for dynamic calibration control. By inverting the phase delay of each reference laser detection element signal in real time, the method measures the inclination angle of the moving mirror. The method comprises: continuously and synchronously triggering and sampling two pairs of orthogonal signals Ia and Ia' and Ib and Ib' at high speed,sures the inclination angle of the moving mirror. The method comprises: continuously and synchronously triggering and sampling two pairs of orthogonal signals Ia and Ia' and Ib and Ib' at high speed,and calculating the orthogonal signals to acquire a real-time direct current component parameter and an alternating current component amplitude parameter as a digital filter value parameter and a normand calculating the orthogonal signals to acquire a real-time direct current component parameter and an alternating current component amplitude parameter as a digital filter value parameter and a normalized parameter; sampling and normalizing the digital filter value of the signals to obtain two points (Ia', Ia'') and (Ib', Ib'') on a unit circle; calculating the phases of the two points, and limialized parameter; sampling and normalizing the digital filter value of the signals to obtain two points (Ia', Ia'') and (Ib', Ib'') on a unit circle; calculating the phases of the two points, and limiti

Description

technical field [0001] The invention relates to an optical measurement technology, in particular to a large-range angle measurement method for the inclination angle of a plane moving mirror in a Fourier spectrometer, which is suitable for measuring the inclination angle of a plane mirror structure moving mirror in a Fourier spectrometer. Background technique [0002] Fourier transform spectrometer has the advantages of multi-channel, high luminous flux, high spectral resolution and high spectral accuracy. As a high-precision instrument, its performance is restricted by many factors. For moving mirror Fourier spectrometers with flat mirror structure, the collimation of the moving mirror is one of the main restrictive factors. Theoretical analysis shows that the inclination angle of the moving mirror will significantly reduce the spectral quality (see "Analysis of the Error Tolerance of the Inclination Error of the Moving Mirror in the Interferometric Spectrometer", Xiang Lib...

AI Technical Summary

Problems solved by technology

This detection method has high precision, but it needs the direction signal of the moving mirror. When the moving mirror is in the turning area, because the direction information is not clear, if 2Δθ(α) exceeds ±π, the system is difficult to track and measure, that is, this The method is suitable for the measurement of small inclination angles where 2Δθ(α) does not exceed ±π

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