Silicone base capacitance microphone

Abstract

The invention provides a silicone base capacitance microphone, comprising a base with a cavity in the center, a back plate, a diaphragm opposite to the back plate in a certain distance from the back plate, wherein the diaphragm comprises a vibration main body in the center position and a plurality of T shaped supporting arms extending from the peripheral side of the vibration main body and an abdication base depressing inwards from the inner wall of the cavity is set mounted in the right inferior of the middle segment of a supporting arm in the base. Compared with the prior technique, the distance between the position of the supporting arm connected with the base and the vibration main body is prolonged without reducing the main body size of the diaphragm. Even though the turning arm of the diaphragm is prolonged, the diaphragm vibration amplitude is increased and the product sensitivity is increased.

Description

【Technical field】 [0001] The invention relates to a microelectromechanical system silicon-based capacitive microphone. 【Background technique】 [0002] Microphones that are currently widely used include traditional electret microphones and emerging micro-electromechanical system microphones (Micro-Electro-Mechanical-System Microphone, referred to as MEMS microphones). MEMS microphones are made of silicon-based semiconductor materials, so they are also called silicon base microphone. Its package volume is smaller than traditional electret microphones, and its performance is also good. Therefore, in recent years, silicon-based MEMS microphones have made great room for development. [0003] Such as figure 1 As shown, it is a schematic cross-sectional view of a related MEMS silicon-based microphone 2, which includes a base 20 with a cavity 200 in the center, a back plate 21 accommodated in the cavity, and a vibrating plate 21 opposite to the back plate and spaced at a certain ...

AI Technical Summary

Problems solved by technology

However, since the outer peripheral side of the vibrating body is close to the inner wall 201 of the base cavity 20 of this type of microphone, the effective distance of the supporting arm as the rotating force arm is very short, resulting in limited amplitude of the vibrating body.

In order to solve this problem, there is a plan to reduce the size of the vibrating body and increase the distance between the vibrating body and the inner wall of the base cavity, thereby increasing the effective distance of the support arm as the rotating force arm. Although this can effectively improve the vibration The amplitude of the main body, but the size of the vibrating body is reduced, and the sensitivity of the product will decrease

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