Incremental analysis of layout design data
A technology for layout design and analysis standards, applied in the field of incremental layout analysis, which can solve complex problems
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[0017] Organization of layout design data
[0018] As used herein, the term "design" is meant to include data describing an entire micro device, such as an integrated circuit device or a microelectromechanical system (MEMS) device. However, the term is also intended to include smaller sets of data describing one or more components of an overall microcircuit, such as a layer of an integrated circuit device, or even a portion of a layer of an integrated circuit device. Further, the term "design" is also meant to include data describing multiple microdevices, such as data that will be used to create a mask or reticle to simultaneously form multiple microdevices on a single substrate. The layout design data may be in any desired format, such as the Graphical Data System II (GDSII) data format or the Open Artwork System Interchange Standard (OASIS) data format proposed by Semiconductor Equipment and Materials International (SEMI). Other formats include the Open Access open source ...
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