Supercharge Your Innovation With Domain-Expert AI Agents!

Method for prolonging service life of vacuum pump of single crystal furnace

A technology of vacuum pump and single crystal furnace, which is applied in the direction of single crystal growth, chemical instruments and methods, crystal growth, etc., can solve the problems of vacuum pump pumping speed decline, etc., and achieve the effect of improving service life and saving costs

Inactive Publication Date: 2012-06-06
NAN AN SANJING SOLAR POWER
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is only a layer of fine metal mesh in the ordinary vacuum filter, which can only filter impurities with larger particles, and it is difficult to remove impurities with smaller particles in the airflow, such as dust. Therefore, it is still difficult to prevent fine impurities from entering the vacuum pump. in oil
[0004] Therefore, regular replacement of vacuum pump oil and installation of vacuum filters can improve the stability of vacuum pump pumping speed to a certain extent, but there are still many defects, especially for the decline of vacuum pump pumping speed during the growth of silicon single crystal.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for prolonging service life of vacuum pump of single crystal furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] refer to figure 1 , the oil filter of the present invention is installed between the vacuum pump and the furnace body, and includes a filter cavity 3, a filter cover 2 at the top of the cavity, and an air inlet pipe 1 at the center of the filter for connecting The outlet pipe of the furnace chamber; an exhaust pipe 6 located on the side of the filter cavity, connected to a vacuum pump. There is an organic silicon oil layer 5 at the inner bottom of the filter chamber 3, which is composed of vacuum pump oil, and is used to absorb fine impurities in the gas; above the organic silicon oil layer 5, there is a stainless steel filter screen 4 for filtering For coarser particle impurities, the outlet of the air inlet pipe 1 is located between the silicone oil layer 5 and the filter screen 4 . The arrows in the figure indicate the direction of gas flow.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a method for prolonging the service life of a vacuum pump of a single crystal furnace. In the method, an oil filter is arranged on a vacuum pumping pipeline between the vacuum pump and a furnace chamber so as to filter various impurities carried by air flow from the furnace chamber. Before the air flow carrying various impurities leaves the furnace chamber and enters the vacuum furnace, the impurities are filtered through the oil filter to protect vacuum pump oil, so that the service life of the vacuum pump is correspondingly improved.

Description

technical field [0001] The invention relates to a method for prolonging the service life of a vacuum pump, in particular to a method for prolonging the service life of a vacuum pump used in a single crystal furnace. Background technique [0002] The Czochralski method is the main method for producing silicon single crystals. During the crystal pulling process, the impurities and silicon oxides volatilized due to the high temperature in the furnace will be absorbed into the vacuum pump oil and mixed with the pump oil. As the working time increases, the viscosity of the vacuum pump oil will continue to increase, resulting in a decrease in the efficiency of vacuuming. To a certain extent, the vacuum pump must replace the pump oil regularly. Although the pump oil is changed frequently, the efficiency of the vacuum pump will decrease significantly with the increase of the usage rate, which is mainly caused by too many impurities in the vacuuming process. In addition, due to th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/00
Inventor 南毅马殿军张伟娜郑智雄林霞胡满根
Owner NAN AN SANJING SOLAR POWER
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com