Improved holding device of evaporated materials of evaporator
A technology of a holding device and an evaporation machine, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of shortened service life, inapplicability, and affecting the mechanical properties of knives and tools, and achieves easy maintenance , Low manufacturing cost and simple structure
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[0033] The detailed description and technical content of the present invention are described below with accompanying drawings. However, the attached drawings are provided for reference and illustration only, and are not intended to limit the present invention.
[0034] Please refer to FIG. 1 to FIG. 3 , the present invention provides an improved holding device for an evaporating machine; in this embodiment, the holding device 1 is installed inside the evaporating machine 2 for holding the object to be plated. The holding device 1 is driven and supported by the driving device 10a. The driving device 10a has a fixed shaft 11a and a rotating shaft 12a. The fixed shaft 11a is vertically fixed on the inner top surface of the vapor deposition machine 2. A rotating wheel 13a is pivoted at one end thereof, and the rotating shaft 12a is connected to a driving device such as a motor (not shown) and is electrically connected to the bias power supply 9 to drive the rotating disk 14a and th...
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