Optical detection method for microcosmic defect expansion of film surfaces and implementing device

A technology for microscopic defect and optical detection. It is applied in optical testing flaws/defects, image data processing, instruments, etc., and can solve problems such as easy loss of image details.

Inactive Publication Date: 2010-07-21
TIANJIN UNIV
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  • Abstract
  • Description
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  • Optical detection method for microcosmic defect expansion of film surfaces and implementing device
  • Optical detection method for microcosmic defect expansion of film surfaces and implementing device
  • Optical detection method for microcosmic defect expansion of film surfaces and implementing device

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Embodiment Construction

[0031] The present invention utilizes image processing methods to localize membrane descaling buckling failures in membrane / substrate structures. It involves many fields such as image processing, mechanical detection of micro-nano structure and experimental mechanics.

[0032] In the present invention, the edge detection technology in the digital image processing method is also used, and it is properly improved to make it suitable for the boundary detection of decontamination and buckling.

[0033] The invention calculates the expansion process of the buckling boundary by detecting the buckling boundary in a plurality of continuously collected decontamination buckling damage images. The edge detection algorithm used to determine the buckling boundary is an important content of the present invention.

[0034] The present invention overcomes the shortcomings of the above-mentioned common edge detection methods, and proposes an image processing method for detecting edges with lo...

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Abstract

The invention relates to image processing, the mechanics detection of microcosmic structures and experimental mechanics, in particular to an optical detection method for the microcosmic defect expansion of film surfaces. The invention aims to provide a technical scheme for detecting the expansion processes of buckling boundaries. The invention has the technical scheme that the implementing device of the optical detection method for the microcosmic defect expansion of the film surfaces comprises an optical microscope system, an image collecting device, an input end, a storing device and a processor, wherein the processor is used for processing datasets representing images under the control of a program so as to determine the boundaries destroyed by buckling in the film/base structures of the images and the expansions of the boundaries through operation, and the output end is used for displaying the detection results of the expansion of the buckling-destroyed boundaries. The invention is mainly applied to the mechanics detection of the microcosmic structures.

Description

technical field [0001] The invention relates to image processing, mechanical detection and experimental mechanics of micro-nano structures, and specifically relates to an optical detection method for the expansion of microscopic defects on the surface of a thin film. Background technique [0002] In the past 20 years, nanotechnology has become a booming new science. Huge manpower and material resources have been invested in research and exploration in this field, both at home and abroad. At present, countries have not only made important progress in nanomaterials, but also developed various nanostructures on the basis of the development of nanomaterials. Nano-film refers to the nano-scale only in the thickness direction, and usually it is composed of molecules or grains spread evenly to form a film. The film / substrate structure is a binary system composed of nano-film and substrate materials, which is often used in MEMS systems. Desorption buckling is one of the common fa...

Claims

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Application Information

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IPC IPC(8): G01N21/88G06T7/00
Inventor 王世斌李林安房予铮贾海坤王志勇
Owner TIANJIN UNIV
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