Unbalanced magnetron sputtering C/Ta graphite-like carbon film and preparation method thereof

A magnetron sputtering and unbalanced technology, which is applied in sputtering plating, ion implantation plating, coating, etc., can solve the problems of insufficient lubrication ability and extreme pressure wear life, and achieve the improvement of base film bonding force, durability The effect of improving abrasiveness

Active Publication Date: 2012-01-11
CSIC NO 12 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a kind of non-equilibrium magnetron sputtering C / Ta type graphite carbon film, has solved the problem that existing non-equilibrium magnetron sputtering C / Cr type graphite carbon film lubricity and extreme pressure wear life are insufficient

Method used

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  • Unbalanced magnetron sputtering C/Ta graphite-like carbon film and preparation method thereof
  • Unbalanced magnetron sputtering C/Ta graphite-like carbon film and preparation method thereof
  • Unbalanced magnetron sputtering C/Ta graphite-like carbon film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Determine the graphite-like carbon film composition, wherein, the transition layer 2 adopts pure Cr, and the composition of the C / Ta composite working layer 4 is designed according to the mass percentage, Ta: 10%, the balance is C, and the sum of the mass percentages of each component is 100%.

[0053] Carry out pre-treatments such as rust removal and polishing on the coated workpiece, and perform ultrasonic dewaxing, degreasing cleaning, drying, and evenly fix the cleaned workpiece on the special coating tooling.

[0054] First, the surface of the part is cleaned by sputtering, and the vacuum degree is 10 -3 Pa, bias voltage 500V, tooling rotation speed 1.0r / min. First use the static recoil technology to sputter clean the surface layer of the metal substrate; gradually increase the sputtering current of the Cr sputtering target to 5.0A to prepare a 0.3μm Cr metal transition layer; then gradually increase the sputtering current of the C target to 6.0A, At the same tim...

Embodiment 2

[0056] Determine the composition of the graphite-like carbon film, wherein the transition layer 2 adopts pure Cr, and the composition of the C / Ta composite working layer 4 is designed according to the mass percentage, Ta: 30%, the balance is C, and the sum of the mass percentages of each component is 100%.

[0057] Carry out pre-treatments such as rust removal and polishing on the coated workpiece, and perform ultrasonic dewaxing, degreasing cleaning, drying, and evenly fix the cleaned workpiece on the special coating tooling.

[0058] First, the surface of the part is cleaned by sputtering, and the vacuum degree is 10 -3 Pa, bias voltage 600V, tooling rotation speed 3r / min. First use the static recoil technology to sputter clean the surface layer of the metal substrate; gradually increase the sputtering current of the Cr sputtering target to 6.0A to prepare a 0.4μm Cr metal transition layer; then gradually increase the sputtering current of the C target to 7.0A, Reduce the ...

Embodiment 3

[0060] Determine the composition of the C / Ta graphite carbon film, the transition layer 2 uses pure Cr, and the composition of the C / Ta composite working layer 4 is designed according to the mass percentage: Ta: 50%, the balance is C, the sum of the mass percentages of each component is 100%.

[0061] Carry out pre-treatments such as rust removal and polishing on the coated workpiece, and perform ultrasonic dewaxing, degreasing cleaning, drying, and evenly fix the cleaned workpiece on the special coating tooling.

[0062] First, the surface of the part is cleaned by sputtering, and the vacuum degree is 10 -4 Pa, bias voltage 700V, tooling rotation speed 5r / min. First use the static recoil technology to sputter clean the surface layer of the metal substrate; gradually increase the sputtering current of the tantalum target to 7.0A to prepare a 0.5μm Ta metal transition layer; then gradually increase the sputtering current of the C target to 8.0A and reduce it by one The sputte...

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Abstract

The invention discloses an unbalanced magnetron sputtering C / Ta graphite-like carbon film, which consists of a transition layer, a gradient layer and a C / Ta compound working layer compounded on a matrix metal surface in turn. The C / Ta compound working layer comprises the following components in percentage by mass: 10 to 50 percent of Ta and 50 to 90 percent of C. A preparation method for the unbalanced magnetron sputtering C / Ta graphite-like carbon film comprises the following steps of: firstly, determining the composition of the unbalanced magnetron sputtering C / Ta graphite-like carbon film;secondly, de-rusting, polishing, ultrasonically de-waving, de-oiling, cleaning and drying the matrix metal, and fixing the cleaned matrix metal on a film coating tool; and finally, performing sputtering and film coating on the cleaned matrix metal to obtain the unbalanced magnetron sputtering C / Ta graphite-like carbon film. The C / Ta graphite-like carbon film with super-lubricating capability is prepared by using good modification function of Ta on the like graphite and introducing the tantalum element into the magnetron sputtering technology by adopting multi-target technology, and the C / Ta graphite-like carbon film is a novel high-performance solid lubricating composite film.

Description

technical field [0001] The invention belongs to the technical field of physical vapor deposition of thin film materials and modern surface engineering technology, and specifically relates to an unbalanced magnetron sputtering C / Ta-like graphite carbon film, and the invention also relates to a preparation method of the similar graphite carbon film. Background technique [0002] In recent years, research on amorphous carbon films with high hardness and low coefficient of friction has become a hot spot and has received extensive attention. At present, the commonly used method to improve the wear resistance and friction reduction performance of solid lubricants is to compound the second phase metal elements in solid lubricants, typical nanocomposite films such as MOST, Graphit-ic (C / Cr), Dymon-iC and WC / a-C . Among them, the graphite-like carbon film (C / Cr) mainly composed of sp2 hybridization has high hardness, low friction coefficient, small internal stress, and excellent env...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): C23C14/06B32B9/04C23C14/35
Inventor王佐平马中伟张镜斌王伟孙长涛
OwnerCSIC NO 12 RES INST