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Adjustable vacuum flow-limiting valve

A flow-restricting valve and adjustable technology, used in lift valves, valve details, safety valves, etc., can solve the problems of small stable flow that cannot be finely adjusted, rough pumping speed and flow control, etc., to improve stability and efficiency. The effect of reliability, high coating quality

Inactive Publication Date: 2010-09-29
BEIJING TECHNOL SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method is rough for the control of the pumping speed and flow rate, and it cannot be finely adjusted for small stable flow rates.

Method used

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Embodiment Construction

[0031] Below in conjunction with accompanying drawing, the technical scheme of the utility model is further described.

[0032] Such as figure 1 , figure 2 Shown is the structural diagram of the adjustable vacuum flow limiting valve of the present invention, the flow limiting valve is composed of a thick-walled flange 1, a stepping motor 2, a motor driver 3, a main shaft 4, an adjusting device and a rotating plate 18.

[0033] The adjustment device is composed of a transverse strut 13 and a transverse strut shaft 14, and the rotating plates 18-25 are respectively installed on the inner wall of the thick-walled flange 1 through the shafts at both ends, and a stepping motor is installed on one side of the thick-walled flange 1 2 and the motor driver 3, the stepping motor 2 and the motor driver 3 are fixed by the strut 10 and the nut 11, the main shaft 4 and the stepping motor 3 are connected by the screw 8, the oil seal gland 5 and the skeleton oil seal 6 and the shaft sleeve ...

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Abstract

The invention belongs to the technical field of a fluid valve, in particular to an adjustable vacuum flow-limiting valve which is a flow-limiting valve used between a vacuum chamber and a vacuum pump system, and is used for limiting the pumping speed of a pump system and a vacuum cavity of a vacuum system. The flow-limiting valve consists of a thick-wall flange, a stepping motor, a motor driver, a main shaft and a rotating plate of an adjusting device, wherein one side of the thick-wall flange is provided with the stepping motor and the motor driver which are fixed with nuts by support rods; the stepping motor is fixedly connected with a main shaft by a screw; the main shaft is connected with a transverse support rod and a transverse support rod shaft by convex blocks which are fixed by the screws; the transverse support rod and the transverse support rod shaft are respectively fixed by the screws and the nuts; and the rotating plate is fixedly connected with the adjusting device by a pulling plate, a rotating shaft and the screw. The adjustable vacuum flow-limiting valve has the advantages that the flow-limiting valve has reasonable structure, has the function of stabilizing the pumping speed, and has the characteristics of small volume, low cost and long service life.

Description

technical field [0001] The invention belongs to the technical field of fluid valves, in particular to an adjustable vacuum flow limiting valve. Background technique [0002] Vacuum valves are an essential part of vacuum equipment. The controllability and stability of vacuum valves directly affect the performance of vacuum equipment. The valves used in the vacuum system generally include flapper valves, flap valves, butterfly valves and flapper valves. And can be subdivided into vacuum flapper valve series, metal seal pneumatic vacuum flapper valve series, manual vacuum swing valve series, pneumatic vacuum swing valve series, quick closing vacuum valve series, manual vacuum flapper valve series, pneumatic vacuum flapper valve series, normally closed pneumatic vacuum flapper valve series, normally closed electromagnetic vacuum flapper valve series, manual vacuum diaphragm valve series, manual ultra-high vacuum flapper valve series. These valves are generally in a fully close...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K1/18F16K31/04F16K17/20
Inventor 陈良贤施戈
Owner BEIJING TECHNOL SCI
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