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Substrate classifying device

A sorting device and substrate technology, applied in storage devices, transportation and packaging, conveyor objects, etc., can solve problems such as inability to classify substrates, and achieve the effect of suppressing retention

Inactive Publication Date: 2012-07-11
IHI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the sorted substrates stay on the conveying line of the sorting destination, the row of the stagnant substrates will soon exceed the transverse conveyor and reach its front, so that the substrates cannot be sorted on the conveying line where no substrates remain.

Method used

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Experimental program
Comparison scheme
Effect test

no. 1 approach

[0035] figure 1 It is a top view showing the structure of the board|substrate sorting apparatus 1 which concerns on 1st Embodiment of this invention. The substrate sorting apparatus 1 of the present embodiment includes a transport line 3 through which various types of substrates 101 are mixed and transported, and a random access buffer device 5 that sorts the substrates 101 on the transport line 3 .

[0036] The conveyor line 3 includes a plurality of conveyor belts CV, CV, . . . from conveyor line 3 figure 1 The conveyer CV on the carrying-in side most left (left side) carries in the substrate 101 . Additionally, on conveyor line 3 the figure 1 The carrying-in side of the random access buffer device 5 is connected to the conveyor CV on the carrying-out side most right (right side) among them. A processing device 9 (processing device) is arranged downstream of the random access buffer device 5 . Each conveyor CV for carrying in and carrying out the substrate 101 is connec...

no. 2 approach

[0055] In the first embodiment, the case where the random access buffer device 5 is fixed has been described, but the random access buffer device 5 may be mobile. A device constructed in this way is Figure 4 The board|substrate sorting apparatus 1A of 2nd Embodiment of this invention shown in the top view of.

[0056] In the substrate sorting apparatus 1A of the present embodiment, the processing device A9A for processing the substrate A101A and the processing device B9B for processing the substrate B101B are used together. Therefore, the board sorting apparatus 1A of this embodiment has the moving means 13 which moves the random access buffer 5 between a 1st position and a 2nd position. The moving unit 13 is, for example, a device that moves a slider on which the random access buffer device 5 is mounted on a rail using a motor or the like.

[0057] The random access buffer device 5 of this embodiment moves between the first position and the second position by the moving un...

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Abstract

A substrate classifying device comprises the following components: a substrate conveying line, a processor which is provided at the downstream of the conveying line and processes the substrates, and a random access buffer. The random access buffer is provided between the conveying line and the processor and is provided with a plurality of holding parts for temporarily holding the substrates. Furthermore the substrates are received to random holding parts in the plurality of holding parts. Furthermore the substrates are handed to the processor from the random holding parts. The random access buffer is provided in the substrates which are held in the holding parts and sieves the kind of substrate, which is processed by the processor, and hands to the processor.

Description

technical field [0001] The present invention relates to a substrate sorting device for conveying substrates from a substrate conveying line to a downstream processing device. Background technique [0002] For example, as a countermeasure against the problem of substrate accumulation on a sheet conveying line that conveys a semiconductor substrate to a processing device such as a processing device, a buffer device that temporarily stores the substrate can be used. In the conventional buffer device, there are the following two devices, the device that transfers the substrate by an arm or a fork between the lifting cassette frame and the conveying line (for example, patent document 1), and the lifting type installed on the conveying line. The in-line buffer device of the rack (for example, patent document 2). [0003] If it is a buffer device that transfers substrates between the rack and the conveyor line, an arm or a fork is required outside the conveyor line in order to app...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G1/137B65G49/06H01L21/677
Inventor 志田伦教
Owner IHI CORP