Vacuum detector
A vacuum degree detector and vacuum degree technology, used in vacuum gauges, instruments, measuring devices, etc., can solve problems such as complicated installation, leakage of pressure gauges and their accessories, and difficulty in guaranteeing service life.
Inactive Publication Date: 2010-12-15
DANDONG KELIANG ELECTRON
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Problems solved by technology
Every vacuum working pump must be equipped with a pressure gauge. Its sealing and assembly requirements are extremely strict, the installation is relatively complicated, and there will be considerable deviations during use. The installation of the pressure gauge and its accessories will inevitably have the possibility of leakage. It is difficult to guarantee its normal service life
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[0007] The vacuum degree detector provided by the patent application of the present invention is essentially a humidity detector for vacuum degree. The detector includes a humidity detection head 3 and a signal processing unit for processing the signal transmitted by the temperature detection head 3, a display unit, a power supply unit, and a humidity detection head. 1 is placed in the vacuum chamber 2 or in the space connected to the vacuum chamber 2, and connected with the electrical connection socket 1 sealed and assembled in the vacuum chamber 2, and the electrical connection socket 1 can be a sealed plug connector for aviation; signal processing The input terminal of the humidity acquisition signal of the unit is plugged and electrically connected with the electric connection socket, and the detection value is displayed through the amplifying circuit, the analog / digital conversion circuit and the display unit. Described signal processing unit, one implementation structure ...
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The invention relates to a vacuum electronic detection device. A vacuum detector is substantially a vacuum humidity detector. A humidity detection head of the detector is connected on an electric connection component hermetically assembled in a vacuum cavity, and a signal processing unit of a humidity detection head transformation signal is connected with the electric connection component so as to form the vacuum detector together. The technical scheme changes conscious misunderstanding of detecting vacuum by a method for detecting a pressure value and finishes the detection of the vacuum by using a humidity detection means, so the vacuum detector only needs a hermetically assembled simpler electric connection plug for internal and external electric connection in the absence of a pipeline mechanical connection structure of a pressure instrument, can effectively, durably and stably ensure the vacuum state, and has the advantages of small volume, easy guarantee of detection precision and long service life.
Description
technical field [0001] The patent application of the present invention relates to an electronic detection device for vacuum degree. Background technique [0002] Until now, the vacuum detection of a space is realized by pressure detection. Every vacuum working pump must be equipped with a pressure gauge. Its sealing and assembly requirements are extremely strict, the installation is relatively complicated, and there will be considerable deviations during use. The installation of the pressure gauge and its accessories will inevitably have the possibility of leakage. It is difficult to guarantee its normal use period. Contents of the invention [0003] The purpose of the invention of the patent application of the present invention is to completely change the existing technical situation of directly measuring the pressure value to realize the vacuum degree detection, and to provide a new type of vacuum degree detector that uses the humidity detection method to realize the va...
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IPC IPC(8): G01L21/00
Inventor 王丽娜邹利民张建军
Owner DANDONG KELIANG ELECTRON