Measuring device for inner bore surface roughness of workpiece
A surface roughness, measuring device technology, applied in electromagnetic measuring device, electrical/magnetic roughness/irregularity measurement, etc., can solve the problem of high cost
Active Publication Date: 2010-12-29
广州中广测计量检测技术有限公司
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Problems solved by technology
At present, most of the measurement of the surface roughness of the inner hole of the workpiece needs to be completed by large-scale precision measuring machines (such as optical detection equipment, etc.), and the cost is relatively high
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[0007] see figure 1 , The workpiece inner hole surface roughness measurement device 100 according to the preferred embodiment of the present invention includes a base 10 , three fixing plates 20 , three sets of springs 30 , a rotating shaft 40 and a micrometer 50 .
[0008] The base 10 includes a disc-shaped bottom 12 and a cylindrical sidewall 14 . The disc-shaped base 12 includes a bearing surface 122 . The outer diameter of the cylindrical side wall 14 is substantially the same as the diameter of the disc-shaped bottom plate 12 . The cylindrical sidewall 14 is aligned with the edge of the disk-shaped bottom plate 12 and vertically set up on the supporting surface 122 . In this way, the disc-shaped bottom plate 12 and the cylindrical side wall 14 jointly define a cylindrical inner space 142 . The cylindrical inner space 142 has a fixed central axis 144 , that is, the central axis of the cylindrical sidewall 14 . In this embodiment, the disc-shaped bottom plate 12 and the...
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The invention provides a measuring device for inner bore surface roughness of a workpiece, which comprises a base, three fixed plates, three groups of elastic elements, a rotating shaft and a micrometer, wherein the base comprises a bearing surface and a side wall arranged on the bearing surface, and the side wall defines an internal space provided with a fixed central shaft; the three fixed plates face towards the fixed central shaft and are placed in the internal space; three groups of the elastic elements are used for connecting corresponding fixed plates to the side wall, and the acting force of the elastic elements faces towards the fixed central shaft; the rotating shaft is arranged along the central shaft; and the micrometer comprises a probe and a numerical reader, the probe is fixed on the rotating shaft and used for sensing the inner bore surface roughness of the workpiece and generating a corresponding electric signal, and the reader is electrically connected with the probeand used for receiving and processing the electric signal as well as calculating and displaying the corresponding roughness. The measuring device of the invention realizes measurement of the inner bore surface roughness of the workpiece by adopting a simple mechanism, and has low cost.
Description
technical field [0001] The invention relates to a device for measuring the surface roughness of the inner hole of a workpiece. Background technique [0002] At present, industrial production has higher and higher requirements on the surface roughness of inner holes of workpieces with inner holes (such as pipes and barrels used in semiconductor machines). Therefore, before the workpiece is used, it is usually necessary to measure the surface roughness of the inner hole of the workpiece to determine whether the workpiece meets the requirements for use. At present, most of the measurement of the surface roughness of the inner hole of the workpiece needs to be completed by large-scale precision measuring machines (such as optical detection equipment, etc.), and the cost is relatively high. Contents of the invention [0003] In view of this, it is necessary to provide a low-cost device for measuring the surface roughness of the inner hole of the workpiece. [0004] A device f...
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IPC IPC(8): G01B7/34
Inventor 王子威
Owner 广州中广测计量检测技术有限公司