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A technology of a stocker and a storage unit, which is applied in the field of stockers, can solve the problems of high price of air cleaning devices, rising construction/operation costs of manufacturing plants, and increase in quantity, etc., so as to reduce construction/operation costs, reduce space, and save effect of space

Active Publication Date: 2013-02-13
IHI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, the above-mentioned air cleaning device is expensive, and there is a problem that the construction / operating cost of the manufacturing plant increases due to the increase in the number of installed air cleaning devices.

Method used

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Embodiment Construction

[0042] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 It is a perspective view of the stocker S of this embodiment.

[0043] The stocker S of this embodiment is installed in the manufacturing plant of the panel for a display. The stocker S includes a rack 1 and a tower crane 2 .

[0044] The rack 1 has a storage unit 11 for storing a case C capable of storing a product or its material (glass substrate, etc.) of a plurality of panels for a display. In addition, a plurality of storage units 11 are provided in the extending direction on the horizontal plane of the guide rail 21 described below, and two or more storage units 11 are provided in the vertical direction. The rack 1 is formed of a columnar member and does not have a wall surface or the like.

[0045] The tower crane 2 is provided with: two guide rails 21 installed on the ground of the manufacturing plant and extending in parallel along the frame 1; Viewe...

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Abstract

A stocker wherein presence of chambers enables even less air cleaning devices than the conventional art to eliminate occurrence of calm portions or stagnation in the flows of air on the downstream sides of the opening portions of the chambers.  Consequently, even the less air cleaning devices than the conventional art are capable of preventing occurrence of a failure, thereby decreasing in costs for construction and management of a manufacturing factory.

Description

technical field [0001] The present invention relates to a stocker provided with a storage unit having a loading port on the front side of a shelf, and more particularly to a stocker provided with an air cleaning device for filtering air and supplying the filtered air. [0002] this application claims priority based on Japanese Patent Application No. 2008-153176 for which it applied to Japan on June 11, 2008, and uses the content here. Background technique [0003] In manufacturing plants of semiconductor devices and display panels, etc., stockers are used to temporarily store the above-mentioned products and their materials. [0004] In the manufacture of semiconductor devices and display panels, etc., the more the amount of dust in the manufacturing plant increases, the easier it is to produce defective products during manufacturing, and the reliability of the product is also greatly reduced. Therefore, in a manufacturing factory as described above, in order to suppress th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G1/00
CPCH01L21/67769B65G1/02
Inventor 石桥希远平田贤辅
Owner IHI CORP