Compound photon sieve for large-caliber imaging and manufacturing method thereof

Abstract

The invention discloses a compound photon sieve for large-caliber imaging and a manufacturing method thereof and belongs to the technical field of diffractive optical elements. The compound photon sieve comprises a transparent substrate and a lightproof metal film plated on the pervious substrate; a series of transparent girdles and pervious apertures which are randomly distributed are designed on the lightproof film; a pervious plane can be made of transparent materials such as fused quartz, common glass, organic glass and the like; the lightproof film is a metal light-blocking layer of chromium, gold, aluminum, copper and the like prepared on the transparent substrate; and the transparent girdles and the transparent apertures are not provided with the metal light-blocking layer. Compared with Fresnel wave zone plates, the compound photon sieve provided by the invention can improve numerical aperture and imaging resolution and can effectively restrain side-lobe effect and high-order diffraction in the direction of an optical axis; and compared with a common photon sieve, the compound photon sieve can improve imaging contrast, effectively reduces data volume of geometry data standard II (GDSII) map files, and reduces the difficulty in processing large-caliber imaging photon sieves.

Description

technical field [0001] The invention relates to the technical field of diffractive optical elements, in particular to a composite photon sieve for large-aperture imaging and a manufacturing method thereof. Background technique [0002] The photon sieve is a new type of diffractive optical element based on the Fresnel zone plate. It replaces the area corresponding to the bright ring on the Fresnel zone plate with a large number of randomly distributed light-transmitting small holes, and the diameter of the small holes is the corresponding 1.5 times the width of the zone plate ring. These light-transmitting small holes randomly distributed in the position make the diffracted light interfere with each other, which can effectively suppress the side lobe effect and advanced diffraction, improve the resolution, and obtain a sharper focal spot. [0003] The resolution of the traditional zone plate in the imaging field depends on the width of its outermost ring, which is limited by...

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Problems solved by technology

[0010] In order to solve the problem that the existing processing technology cannot produce large-diameter imaging photon sieves, another object of the present invention is to provide a method for manufacturing a composite photon sieve for large-diameter imaging, so as to effectively reduce the amount of layout data, so that the existing The advanced processing technology can meet the production requirements of large-diameter imaging photon sieves

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