Method for processing soft and crisp LBO crystals based on consolidated abrasive polishing pad

Abstract

The invention discloses a method for processing soft and crisp LBO crystals based on a consolidated abrasive polishing pad, which is characterized by comprising the following steps: firstly, roughly polishing and machining LBO crystals by the polishing pad of diamond consolidated abrasive of which the granularity is less than or equal to 14 micrometers, wherein in the polishing and machining process, the polishing pressure is controlled to 50-600g / cm<2>, the revolving speed of a polisher is controlled to 10-200 rpm, the pH value of a polishing solution adopted by polishing is controlled to 2-6, and the temperature of the polishing solution is 20-30DEG C to roughly polish the LBO crystals; and then, finely polishing and machining the LBO crystals obtained from the rough machining by the polishing pad of cerium oxide consolidated abrasive of which the granularity is not more than 3 micrometers, wherein the polishing pressure is controlled to 50-600g / cm<2> in the fine polishing and machining process, the revolving speed for polishing is controlled to 10-200rpm, the pH value of a polishing solution adopted by polishing is controlled to 2-6, and the temperature of the polishing solution is 20-30DEG C until the surface quality satisfies a set requirement. The method has the advantages of high processing efficiency and high finished product rate and does not cause environmental pollution.

Description

technical field [0001] The invention relates to a processing method for functional materials, in particular to a polishing processing method for functional crystal material LBO, in particular to a processing method for soft and brittle LBO crystals based on a fixed abrasive polishing pad. Background technique [0002] Lithium triborate (LiB 3 o 5 ) (referred to as LBO crystal) is a functional crystal material with excellent quality, which is widely used in research and application fields such as all-solid-state laser, electro-optic, medicine, and micro-processing. It has broad application prospects in the fields of laser controlled polymerization engineering system and so on. The growth of functional crystals and related nonlinear optical crystals in my country is in the leading position in the world, but there is still a big gap between the polishing process of crystals and the international market, which has become a bottleneck restricting the development of my country's...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to polish soft and brittle LBO crystals with existing free abrasives, because the polishing liquid contains hard abrasives, which are easy to scratch, embed or adsorb on the surface of the crystal to form processing defects, and there are pits, scratches, and microcracks on the surface. , particle embedding or adsorption and other damages, and the process of polishing LBO crystals with free abrasives is complicated, and a large amount of polishing liquid is used, which leads to high processing costs (the cost of polishing liquid accounts for 70% of the processing cost); post-cleaning is difficult, and a large amount of polishing waste liquid and cleaning process To solve a series of problems such as harmful chemicals polluting the environment, a soft and brittle LBO crystal based on a fixed abrasive polishing pad is invented with high processing efficiency, simple process, and good surface quality; the polishing liquid does not contain abrasives, the post-cleaning is simplified, and the processing cost is low. processing methods