30results about How to "No subsurface damage" patented technology

The invention relates to a method for cleaning a sapphire substrate. The surface of a sapphire epitaxial substrate has a larger quality difference of the substrate surface and has a difference in defects of an oxidation layer and a subsurface after being cleaned by organic impurities and inorganic metal impurities due to chemical-mechanical polishing (CMP). The sapphire substrate is generally classified according to the cleaning conditions of the substrate surface. And when an imaging (PSS (Poly(sodium-p-styrenesulfonate))) substrate is prepared or heteroepitaxy is directly carried out, the product uniformity is different so that the final yield of the product is decreased. The method provided by the invention is characterized in that the sapphire substrate is cleaned with the organic impurities and the inorganic metal impurities and then is cleaned with hydrogen-nitrogen plasmas. After the cleaning method provided by the invention is carried out, the surface of the sapphire substrate has no oxidation impurities, defection layers and no subsurface defection layers. The surface quality of the substrate is good in consistency. The cleaning method provided by the invention has high yield of the PSS substrate or high crystallization quality of a GaN layer subjected to the heteroepitaxy.

The invention discloses a method for processing soft and crisp LBO crystals based on a consolidated abrasive polishing pad, which is characterized by comprising the following steps: firstly, roughly polishing and machining LBO crystals by the polishing pad of diamond consolidated abrasive of which the granularity is less than or equal to 14 micrometers, wherein in the polishing and machining process, the polishing pressure is controlled to 50-600g/cm<2>, the revolving speed of a polisher is controlled to 10-200 rpm, the pH value of a polishing solution adopted by polishing is controlled to 2-6, and the temperature of the polishing solution is 20-30DEG C to roughly polish the LBO crystals; and then, finely polishing and machining the LBO crystals obtained from the rough machining by the polishing pad of cerium oxide consolidated abrasive of which the granularity is not more than 3 micrometers, wherein the polishing pressure is controlled to 50-600g/cm<2> in the fine polishing and machining process, the revolving speed for polishing is controlled to 10-200rpm, the pH value of a polishing solution adopted by polishing is controlled to 2-6, and the temperature of the polishing solution is 20-30DEG C until the surface quality satisfies a set requirement. The method has the advantages of high processing efficiency and high finished product rate and does not cause environmental pollution.

The invention provides a titanium alloy pipe inner wall magneto-rheological polishing method and device. Magneto-rheological liquid is pumped into a polishing head inner cavity along the inner surfaceof a transmission rod under the effect of a creepage pump, and flows over through rectangular holes around the middle of a polishing head, the liquid flows to the polishing area from the left side and the right side, under the effect of a magnetic field, the apparent viscosity and the shear yield stress of the magneto-rheological liquid are rapidly increased, a Bingham medium with certain viscousplasticity is formed, along with relative motion of the polishing head and the pipe wall, the Bingham medium carries out shear removal on the pipe wall material, the magneto-rheological liquid obtained after polishing is collected through magneto-rheological liquid collecting mechanisms on the two sides of a pipe fitting, through filtering and stirring, the polishing process is continuously carried out, and circular utilization of the magneto-rheological liquid is achieved; in the magneto-rheological liquid circulation process, heat generated in the polishing area is brought away. The inner wall of the titanium alloy pipe can be automatically polished, the beneficial effects of being easy to control, good in polishing uniformity, high in work efficiency and the like are achieved, and themethod and device are particularly suitable for polishing treatment of the inner wall surface of the fine and long titanium alloy pipe.

The invention relates to a kindle direct publishing crystal micro-nano hygroscopic ultraprecision polishing method based on ultrasonic atomization moisture, which is characterized by first utilizing ultrasound to product water mist, enabling the water mist to be mixed with dry air to form clean water mist air, pressing a polishing head on the crystal surface, introducing the clean water mist air, conducting micro hydrolysis on the portion of the crystal surface contacted with the moist air to form a dissolution layer, then rotating the polishing head, enabling a polishing mat to remove the high point dissolution layer, enabling a vacuum source to absorb surplus moist air, enabling the polishing head to conduct small area local polishing, ensuring polishing evenness in local areas and finally enabling a polishing tool to polish under control of a computer to achieve crystal surface overall situation planarization according to a dwell time function calculated by a material removing rate function R (r, theta) and removing quantity (x, y) of each point. The method does not use traditional polishing liquid, does not need to washing the crystal surface after polishing is finished and is a real damage-free micro-nano processing method due to the fact that no mechanical processing stress exists in the processing process.

The invention discloses a fluid magnetic abrasive hole finishing processing device. The device comprises a driving cylinder and a storage cylinder which are connected into a whole through a middle connecting cover, a front end cover is arranged at the upper end of the driving cylinder, a rear end cover is arranged at the lower end of the storage cylinder, a driving cylinder piston is arranged in the driving cylinder, the lower end of the driving cylinder piston is connected with a piston rod, the other end of the piston rod penetrates the middle connecting cover to extend into the storage cylinder and is provided with a storage cylinder piston, and an oil return port communicating with the inside of the driving cylinder is arranged on a driving cylinder shell and adjacent to the middle connecting cover. After a magnetic field is applied, viscosity is increased rapidly under the action of the external magnetic field, so that grinding media with certain shear yield stress are formed along the hole wall surfaces, further processing such as finishing, grinding and deburring of inner walls of various holes is achieved, and surface adaptability and universality are high.

The invention discloses a shear thickening-electrophoresis composite polishing method. The shear thickening-electrophoresis composite polishing method comprises the following steps of 1) selecting a workpiece clamp, and installing the workpiece clamp on a mechanical arm; 2) clamping the workpiece on a workpiece clamp; 3) polishing solution with the shear thickening-electrophoresis composite effect, and the polishing solution is placed in an infusion tube; 4) polishing solution is input to the polishing disk, and the main spindle is started to drive the polishing disk; and 5) starting the shearthickening effect the mechanical arm for controlling, the direct-current power supply for controlling the electrophoresis effect, polishing solution with the shear thickening-electrophoresis composite effect on surface of workpiece under the action of mechanical arm, and is used for providing a load; actively controlling the micro-rotation of the workpiece, meanwhile, electrophoretic effect of abrasive particles generated at two ends of power supply electrode, so that the height matching and material removal of the polishing solution and the surface of the workpiece are formed, and the shearthickening-electrophoresis composite polishing are realized. The invention provides a high-efficiency, and surface-damage-low / free or sub-surface damage shear thickening and the electrophoresis composite ultra-precision polishing method.

The invention discloses an SiC optical material processing device which comprises an inductive coupling plasma generation device, a working gas supply source (8) and a reaction gas supply source (9). Reaction gas which can have chemical reaction with SiC after being stimulated by the inductive coupling plasma generation device is placed in the reaction gas supply source (9), the inductive coupling plasma generation device comprises a plasma torch pipe (34) and an induction coil (35), the plasma torch pipe (34) is sleeved with the induction coil (35), the working gas supply source (8) and the reaction gas supply source (9) are connected with the plasma torch pipe (34), one end of the induction coil (35) is connected with a radio-frequency power source (4), and the other end of the induction coil (35) is grounded through an adjustable resistor R1. The SiC optical material processing device has the advantages of being simple in structure and low in cost, producing no subsurface damage or residual stress in a processing procedure, having high processing efficiency and the like.

The invention relates to a variable-camber section inner cylindrical surface airflow assisting abrasive flow polishing device. The device comprises an installation frame, wherein a precise three-axis servo driving system, an abrasive flow circulating system and a servo motor driving system are arranged on the installation frame, cylindrical polishing tools are connected with the precise three-axis servo driving system and the servo motor driving system, the cylindrical polishing tools and a variable-camber section tubular workpiece are arranged in the abrasive flow circulating system, the cylindrical polishing tools are arranged in the variable-camber section tubular workpiece and are close to each other, and the cylindrical polishing tools are parallel to the axis of the variable-camber section tubular workpiece. Under the combined action of the precise three-axis servo driving system, the abrasive flow circulating system and the servo motor driving system, the variable-camber section tubular workpiece can be repeatedly polished, the utilization efficiency of abrasive flow can be increased, processing residues can be effectively filtered through a centrifugal pump so as to reduce sewage discharge and achieve clean processing, energy is saved, and the environment is protected.

The invention relates to the technical field of ultra-smooth surface polishing of optical elements, in particular to a polishing device and a polishing method for the ultra-smooth surfaces of the optical elements. The problems of low polishing efficiency, needing of control by a high-precision numerical control machine tool and wave degree error caused by large-area removal in the prior art are solved. The polishing device is of an axisymmetric structure and comprises a pipeline and a grinding head for supplying liquid in the middle, wherein the polishing surface at the lower end of the grinding head is a plane, and a plurality of annular grooves are formed at equal intervals in the polishing surface along the center of a circle; the annular grooves are distributed at the outer circle of the polishing surface, and the pipeline conveys polishing liquid to the center of the grinding head; the polishing liquid is Newtonian fluid, and under the action of pressure, the polishing liquid flows from the center of the grinding head to the periphery to form a liquid film between the polishing surface of the grinding head and a workpiece to separate the grinding head from the workpiece; and the grinding head floats on the surface of the workpiece, the fluid flows through a polishing area to form eddy current at the grooves of the polishing surface and obliquely enters and shoots on the surface of the workpiece, a shearing force is generated on the surface of the workpiece, and material removal is realized.

The invention is applicable to the field of optical element processing, and discloses an optical element surface roughness processing device. The optical element surface roughness processing device comprises a storage tank provided with a polishing solution, a bearing assembly for bearing an optical element to be processed, a polishing assembly for processing the surface roughness of the optical element to be processed, and a pressure applying assembly. The polishing assembly comprises a polishing wheel and a first driving mechanism used for driving the polishing wheel to do rotational motion, the hardness and the elastic modulus of the polishing wheel are far lower than those of the optical element to be processed, the pressure applying assembly is used for applying a load close to the optical element to be processed to the polishing wheel, and the polishing wheel and the optical element to be processed are both arranged in the polishing solution. Under the action of the pressure applying assembly, the contact part of the polishing wheel and the optical element to be processed can deform, a liquid film is formed between the deformation part of the polishing wheel and the optical element to be processed, so that non-contact polishing is performed between the polishing wheel and the optical element to be processed, and the surface roughness of the optical element can be improved; and the surface of the optical element to be processed has no sub-surface damage.

The invention discloses an ultra-precision surface polishing machining device and method. The device comprises a precision two-dimensional moving platform, a standing column precisely moving in the Zdirection, an ultrasonic atomizer, an atomizer holder, an intelligent precision micropump, an ultrasonic power supply and a data processing system. According to the device, the intelligent precision micropump is started to run under the control of the data processing system, polishing agent is conveyed to the ultrasonic atomizer through a polishing agent inputting pipe, then the ultrasonic power supply starts an ultrasonic impulse current under the control of the data processing system, a piezoelectric ceramic plate in the ultrasonic atomizer generates ultrasonic vibration by means of the ultrasonic impulse current, and the polishing agent is atomized into polishing aerosol flow to work on the surface of a workpiece. The ultra-precision surface polishing machining device and method have the advantages that the roughness of the machined surface is uniform, subsurface damage to the workpiece does not occur, and the problems of micro powder agglomeration, nozzle blockage and nozzle wear in the flow-jet polishing machining process do not occur.

The invention provides an abrasive water jet deburring system and method based on visual guidance robots. The system comprises a multi-station working disc, the feeding robot, a vision detector, the machining robot, the discharging robot and a controller, wherein the multi-station working disc is used for placing a machined product, the vision detector detects a product to be machined in a detection position, and the controller is used for controlling the multi-station working disc to sequentially send the product to be machined to a feeding position, the detection position and a machining position and sent the machined product to a discharging position, and is used for controlling the machining robot to machine the product to be machined through the abrasive water jet according to a detected result. According to the abrasive water jet deburring system and method based on the visual guidance robots, the reliability and the stability of product machining can be improved, the productionefficiency can be improved, the production cost can be reduced, meanwhile, machining of various complex curved surfaces can be achieved, it can be guaranteed that no sub-surface damage occurs to the machined product, the polishing precision can be improved, and the boundary effect is avoided.

The invention relates to a micro cutter passivation method and device based on flexible abrasive particles and magnetic composite fluid, a cutting edge of a micro cutter is treated by adopting a magnetic composite fluid polishing principle, and a material on the surface of the cutter is slightly removed by utilizing the rheological property of the magnetic composite fluid and the flexible abrasive particles. Cutting edge passivation treatment and surface polishing treatment of the cutter can be achieved at the same time, and the cutter is high in passivation precision and good in consistency; batch passivation of the miniature cutters is achieved through the multi-clamp design, cutter passivation work and disassembly and assembly operation can be carried out at the same time, and the cutter passivation efficiency is improved. According to the micro cutter passivation method and device based on the flexible abrasive particles and the magnetic composite fluid, micro defects of a cutting edge of a micro cutter can be effectively removed, the contour shape of the cutting edge is improved, tiny burrs on the surface of the cutter are eliminated, the surface quality of the cutter is improved, the service life of the cutter is prolonged, and the part machining quality is improved; and high-precision and high-efficiency passivation treatment on the micro cutter is realized.

A polishing method based on self-excited oscillation of a polishing solution and a force rheology composite effect is used for polishing the inner wall of a pipe fitting, during polishing, the force rheology polishing solution flows through a pipe, the rheology effect is generated due to the shearing effect, a flexible grinding tool is formed on the interface of the force rheology polishing solution and a workpiece, and the inner wall of the pipe fitting is subjected to material removal; during polishing, after the force rheological polishing liquid in the liquid supply pipeline is increased to high pressure, the force rheological polishing liquid passes through the self-excited oscillation device, so that the force rheological polishing liquid has a self-excited oscillation phenomenon and enters a workpiece to be machined, periodic fluctuation of speed and pressure occurs on the inner surface of the workpiece, meanwhile, vibration is applied to the workpiece, and the rheological effect of the force rheological polishing liquid is enhanced. By means of the method, efficient polishing machining of the inner wall of the pipe fitting can be achieved, and the workpiece with low surface roughness and low/no surface damage or subsurface damage is obtained.

The invention provides a novel optical pressurizing grinding-tool-free polishing device which mainly comprises a motor driving module, a sealing tank module and a pressurizing module and is mainly used for polishing optical parts, and the polishing effect is achieved through stable relative movement between a polishing solution and a machined part; specifically, the machined part is driven by a motor to do revolution and rotation movement relative to the polishing solution at the same time, pressure and a magnetic field are applied to the polishing solution with the magneto-rheological property in a sealed tank body, the polishing solution forms a soft grinding disc, and therefore the controllable, stable and strong polishing effect is generated. The novel optical pressurizing grinding-tool-free polishing device has the advantages that traditional grinding tools such as a polishing disc are not needed, the polishing device can adapt to the surfaces of any shapes, polishing is completed through the self-convergence effect generated by stable movement of a machined workpiece relative to a soft grinding disc under the pressurization and magnetic field conditions, the full-coverage and ultra-smooth machining effect on the workpiece can be achieved, surface damage does not exist, and the novel optical pressurizing grinding-tool-free polishing device has the characteristics of high efficiency and controllability.