Water-based magneto-rheological closed flexible polishing head based on normal force

Abstract

The invention discloses a water-based magneto-rheological closed flexible polishing head based on normal force. The polishing head comprises a flexible cutting disc, a magneto-rheological fluid, flexible seal rings, a rotary table, a C-shape magnetic yoke, a shell, baffles, a magnetic coil, a motor, a magnetic shield, shaft couplings, a key, a shaft and abrasive particles. The abrasive particles are evenly distributed on the top surface of the flexible cutting disc; the flexible cutting disc, the flexible seal rings and the rotary table form a seal cavity, and the magneto-rheological fluid is placed in the seal cavity; a rotating shaft is arranged on the center of the bottom surface of the rotary table, blind holes are upwards formed in the center of the rotating shaft, the motor is connected with the shaft through the shaft couplings, and the shaft is connected with the blind holes through the key; the motor is fixed to the top surfaces of the baffles, the motor is separated from the C-shape magnetic yoke through the magnetic shield, the bottom surfaces of the baffles are in contact with the magnetic coil, and the magnetic coil surrounds the closed end of the C-shape magnetic yoke. According to the water-based magneto-rheological closed flexible polishing head based on the normal force, a polishing liquid circulating device is not needed, the size of a flow device is greatly lowered, and the production cost is lowered.

Description

technical field [0001] The invention belongs to precision polishing equipment, in particular to a water-based magnetorheological closed flexible polishing head based on normal force. Background technique [0002] Ultra-smooth surface polishing technology is an important part of the ultra-precision machining system. With the deepening of research and the improvement of detection technology, people have a deeper understanding of the formation mechanism of nano-scale ultra-smooth surfaces, and developed many polishing technologies , such as traditional free abrasive polishing, mainly refers to that the abrasive is freely dispersed in the working interface between the workpiece and the flexible grinding tool, and the abrasive is applied to the abrasive through the workpiece and the grinding tool, so that the abrasive rolls and slides in the working interface and is removed from the workpiece. The processing method of the material, in the polishing process of this method, the con...

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Problems solved by technology

The abrasive material is removed from the workpiece by weak elastic collision with the workpiece surface under the action of hydrodynamic pressure, but the processing efficiency of this method is extremely low (only 5 nm / min)

Dr. Wang Yongqiang from Hunan University recorded a magneto-rheological polishing material removal rate of 2 μm / min in the article "Large Polishing Die Rheological Ultra-smooth Surface Polishing Technology", which has the advantage of improving surface shape accuracy through multi-step modification , gradually reduce the surface roughness without introducing surface and subsurface damage, but at present, all magnetorheological polishing devices need to integrate a polishing liquid circulation device, thereby increasing the size of the entire polishing device and increasing the cost of the polishing device

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