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No-damage numerical control water dissolving, polishing and removing method for KDP crystal surface micro-nano texture

A crystal surface, non-destructive technology, applied in the field of ultra-precision polishing, can solve problems such as influence and poor optical performance of crystal elements, and achieve the effect of improving surface accuracy

Active Publication Date: 2015-12-16
DALIAN UNIV OF TECH
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Problems solved by technology

The subsurface damage layer further adversely affects the optical properties of the crystal element

Method used

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  • No-damage numerical control water dissolving, polishing and removing method for KDP crystal surface micro-nano texture
  • No-damage numerical control water dissolving, polishing and removing method for KDP crystal surface micro-nano texture
  • No-damage numerical control water dissolving, polishing and removing method for KDP crystal surface micro-nano texture

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Embodiment Construction

[0029] The specific implementation manner of the present invention will be described below in conjunction with the technical scheme and accompanying drawings.

[0030] The non-damaging numerical control water-dissolving polishing removal method of the micro-nano texture on the KDP crystal surface adopts the following steps:

[0031] Step 1: Utilizing the water-soluble characteristic of KDP crystals, water-containing oil-based microemulsion is selected as the polishing liquid. The water content in the polishing liquid is controlled within the range of 3%-30% according to the rough and fine polishing quality of the material and the removal rate requirements;

[0032] Step 2: Use a small-sized circular polishing tool with an area smaller than the KDP crystal to be processed, and a polyurethane polishing pad with low hardness is attached to the lower part of the polishing head 1;

[0033] Step 3: The polishing head 1 performs planetary motion relative to the polished KDP crystal 5...

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Abstract

The invention discloses a no-damage numerical control water dissolving, polishing and removing method for KDP crystal surface micro-nano texture, and belongs to a super-precision polishing method. The method comprises the steps that a polishing solution with water is selected for use, a small-size polishing head is used for machining a KDP crystal, a planetary motion revolution center of the polishing head is controlled by a computer to polish the KDP crystal along a preset track, the residence time of all points on the crystal surface is adjusted, and crystal surface figure accuracy is improved; and then the polishing head machines the crystal surface at a constant speed along the polishing track, local residual small-size knife lines are removed, and surface quality is further improved. Removal machining is carried out on materials by means of the physical property that the KDP crystal is soluble in water, subsurface damage caused in a traditional mechanical removing process is avoided, meanwhile, the method can be applied to water-soluble difficult-to-machine materials similar to the KDP crystal, and the problem that small-size waves remaining on the crystal surface after cutting performed by a single-point diamond fly cutter are difficult to remove in existing large-size high-precision KDP crystal element machining is solved.

Description

technical field [0001] The invention relates to a method for removing micro-nano textures on the surface of a KDP crystal without damage by numerical control water-dissolving polishing, which belongs to an ultra-precision polishing method. Background technique [0002] Potassium dihydrogen phosphate crystal (KDP) is a high-quality nonlinear electro-optic crystal material, which is widely used as electro-optic switch and frequency doubling conversion element in inertial confinement fusion (ICF) technology. A large number of large-size, ultra-high-quality KDP crystal components are required in the ICF project, which places extremely high requirements on the processing of KDP crystals. However, due to the characteristics of soft and brittle, soluble in water, and strong anisotropy, KDP crystals are typical difficult-to-process characteristics, and high surface quality and large-diameter (410mm×410mm×10mm) KDP components that meet the requirements of ICF engineering can be proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B29/02
CPCB24B29/02
Inventor 高航王旭陈玉川郭东明
Owner DALIAN UNIV OF TECH
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