Cavity-type graphite boat
A graphite boat and cavity technology, applied in the field of graphite boats, can solve the problems of small capacity of tubular graphite boats, slow reaction speed of silicon wafers, long processing time, etc., to improve the safety of use, short coating time, and fast reaction speed. Effect
Active Publication Date: 2013-05-01
深圳市石金科技股份有限公司
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Problems solved by technology
[0003] Due to the relatively small number of the existing tubular graphite boats, the two electrodes are on the same side, and the capacity of the tubular graphite boat is small, the reaction speed of the graphite boat is slow when processing silicon wafers, the processing time is long, and the production low efficiency
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[0019] The general train of thought of the technical scheme of the present invention is: pass in.
[0020] The technical solution for realizing the purpose of the invention will be described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0021] Such as figure 1 and figure 2 As shown, an embodiment of the present invention proposes a cavity-type graphite boat, including a boat sheet 10, left and right electrodes 40, 50 positioned at the left and right ends of the graphite boat, and the boat sheet 10 includes a left electrode sheet 102 electrically connected to the left electrode 40 And the right electrode sheet 103 electrically connected with the right electrode 40 .
[0022] Wherein, the left electrode sheet 102 and the right electrode sheet 103 are arranged at intervals, and each left ele...
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The invention relates to a cavity-type graphite boat, which comprises boat sheets, a left electrode and a right electrode, wherein the left electrode and the right electrode are positioned at the left end and the right end of the graphite boat; and each boat sheet comprises a left electrode slice electrically connected with the left electrode and a right electrode slice electrically connected with the right electrode. The two electrodes of the graphite boat are arranged at the left end and the right end of the graphite boat to change the electrode structure of the conventional graphite boat; each boat sheet is correspondingly divided into the left electrode slice connected with the left electrode and the right electrode slice connected with the right electrode to ensure that the response speed of the graphite boat in work is increased, the film plating time is short, and the number of the boat sheets of the graphite boat can be increased to 21 to 41; simultaneously, a graphite spacer block of the graphite boat is provided with a boat number column used for measuring the boat number of the graphite boat and recording the using time of the graphite boat to ensure that the graphite boat is more intelligent; besides, a supporting leg of the graphite boat can be fixed on a running trolley, so that the using safety of the graphite boat is improved. Thus, the cavity-type graphite boat not only has a novel structure and is safe and reliable, but also greatly improves the production efficiency.
Description
technical field [0001] The invention relates to the technical field of graphite boats, in particular to a cavity-type graphite boat. Background technique [0002] Graphite boats are the carrier for coating silicon wafers in solar cells. The graphite boats used in the PECVD of existing solar cells are all tubular graphite boats. The number of the boats is usually 11 to 19 pieces, and the two electrodes of the graphite boat They are all on the same side of the graphite boat and are divided into upper electrode and lower electrode. [0003] Due to the relatively small number of the existing tubular graphite boats, the two electrodes are on the same side, and the capacity of the tubular graphite boat is small, the reaction speed of the graphite boat is slow when processing silicon wafers, the processing time is long, and the production low efficiency. Contents of the invention [0004] The main purpose of the present invention is to provide a cavity-type graphite boat with l...
Claims
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IPC IPC(8): C23C16/458H01L31/18
CPCY02P70/521Y02P70/50
Inventor 张志勇
Owner 深圳市石金科技股份有限公司