Aerostatic thrust bearing

A technology of thrust bearings and air static pressure, applied in bearings, shafts and bearings, mechanical equipment, etc., can solve the problems of small load capacity, poor stability, low rigidity, etc., to reduce thermal deformation, improve radial stiffness, and enhance The effect of bearing stability
CN102207130AInactive Publication Date: 2011-10-05INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2011-10-05
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The invention discloses an aerostatic thrust bearing comprising a bearing body, wherein the upper part of the bearing body is provided with an air inlet, a ring slot, an orifice and an air cavity, wherein the orifice is communicated with the ring slot; an included angle between the wall surface of the air cavity and an orifice axis is an orifice jet divergence angle theta which can avoid the inherent edge corner vortex problem of the traditional square or round air cavity; the change of the shape of a runner on the air cavity is utilized to alleviate pressure loss caused by overquick air speed increase and maintain high pressure in a bearing gas, thereby improving bearing carrying capacity and stability; and the orifices are communicated by a pressure equalizing slot to enhance the bearing carrying capacity and stability. The aerostatic thrust bearing is mainly used for designing moving parts in equipment, such as photoetching machines, three dimensional measuring machines and the like and belongs to the technical field of ultra-precise movement and ultra-precise measurement.
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Description

technical field

[0001] The invention belongs to the technical field of ultra-precision movement and ultra-precision measurement, and relates to an aerostatic pressure thrust bearing, which is mainly used for the design of moving parts in photolithography machines, three-coordinate measuring machines and other equipment. Background technique

[0002] Aerostatic thrust bearings have a series of advantages such as no wear, low friction, no creeping at low speeds, and high motion precision, so they are widely used in the fields of ultra-precision motion and precision measurement, but at the same time, they also have low rigidity, low load-carrying capacity, and poor stability. shortcoming.

[0003] Existing aerostatic thrust bearings usually use small hole throttling, high-pressure gas enters the air cavity through the small hole restrictor, and then enters the bearing gap from the edge of the air cavity; the pressure in the air cavity gradually decreases along the bearing gap, ...

Claims

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