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Adaptive device for testing liquid particles

A technology for liquid particles and fitting devices, which can be used in measurement devices, individual particle analysis, particle and sedimentation analysis, etc., and can solve the problems of high test cost and poor measurement repeatability.

Inactive Publication Date: 2013-07-03
WUHAN XINXIN SEMICON MFG CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This shows that the field sampling test method is very susceptible to the influence of particles in the external environment, and the repeatability of the measurement is very poor
Although the second method ensures accurate and reliable measurement results, the cost of testing will be high, and each chemical system to be tested requires a liquid particle counter

Method used

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  • Adaptive device for testing liquid particles
  • Adaptive device for testing liquid particles
  • Adaptive device for testing liquid particles

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Embodiment Construction

[0020] In order to make the purpose and features of the present invention more comprehensible, the specific implementation manners of the present invention will be further described below in conjunction with the accompanying drawings.

[0021] The adapter device for testing liquid particles according to the present invention is connected to a liquid system to be tested and a liquid particle counter, and includes: a buffer container, an introduction unit, a liquid discharge unit and an outlet unit. The introducing unit is connected to the sampling port of the liquid system to be tested, and is used for introducing the liquid into the buffer container. The liquid discharge unit is connected to the buffer container and is used for leading the liquid to the external environment. The export unit is used to deliver the liquid to the liquid particle counter. Since most of the liquid systems to be tested are highly corrosive strong acid liquids or strong alkali liquids, the material ...

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Abstract

The invention discloses an adaptive device for testing liquid particles. Pressure of liquid from a sampling port of a liquid system to be tested to a liquid particle counter can be reduced under the buffer action of a buffer container and a liquid drainage unit, so that one liquid particle counter can be used for monitoring different liquid systems to be tested; and the liquid reaching the liquidparticle counter is isolated from the external environment through the adaptive device, so that influence of particles in the external environment is avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to an adaptation device for testing liquid particles. Background technique [0002] In the production process of semiconductor devices, particles have a great impact on product yield. Among them, the particles in chemicals are the most important impact on the product because they are directly involved in the manufacture of devices. However, most of the chemicals used in the semiconductor industry are strong acid liquids or strong alkali liquids with high viscosity and high volatility, which makes the measurement of particles in these chemicals particularly difficult. For the monitoring of particles in chemicals, existing testing methods mainly include two types: the first is to sample different chemicals on site, and then take the samples to a liquid particle counter (liquid particle counter) for measurement; the second One is to fully connect the liquid particle cou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/10
Inventor 刘克斌谢渊方明海吴静銮张士仁
Owner WUHAN XINXIN SEMICON MFG CO LTD